Publikationen
Toumi S. , Ouennoughi Z. , Murakami K. :Effect of temperature on the Fowler-Nordheim barrier height, flat band potentials and electron/hole effective masses in the MOS capacitors Physica B-Condensed Matter 585 2020 ), Art.Nr.: 412125 ISSN: 0921-4526 10.1016/j.physb.2020.412125 Besendörfer S. , Meißner E. , Zweipfennig T. , Yacoub H. , Fahle D. , Behmenburg H. , Kalisch H. , Vescan A. , Friedrich J. , Erlbacher T. :Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures AIP Advances 10 2020 ), Art.Nr.: 045028 ISSN: 2158-3226 10.1063/1.5141905 Kazantsev D. , Ryssel H. :ASNOM mapping of SiC epilayer doping profile and of surface phonon polariton waveguiding Journal of Applied Physics 127 2020 )ISSN: 0021-8979 10.1063/1.5128104 Besendörfer S. , Meißner E. , Tajalli A. , Meneghini M. , Freitas JA. , Derluyn J. , Medjdoub F. , Meneghesso G. , Friedrich J. , Erlbacher T. :Vertical breakdown of GaN on Si due to V-pits Journal of Applied Physics 127 2020 ), Art.Nr.: 015701 ISSN: 0021-8979 10.1063/1.5129248 Albrecht M. , Klüpfel F. , Erlbacher T. :An Iterative Surface Potential Algorithm Including Interface Traps for Compact Modeling of SiC-MOSFETs IEEE Transactions on Electron Devices 67 2020 ), S. 855-862 ISSN: 0018-9383 10.1109/TED.2020.2967507 Zhao D. , Letz S. , Schletz A. , März M. :A Method for the Characterization of Adhesion Strength Degradation of Thin Films on Si-Substrate under thermal cycling test 2020 CIPS (Berlin 24. März 2020 - 26. März 2020 )Hutzler A. , Fritsch B. , Matthus C. , Jank MPM. , Rommel M. :Highly Accurate Determination of Heterogeneously Stacked Van-der-Waals Materials by Optical Microspectroscopy Scientific Reports 2020 )ISSN: 2045-2322 10.1038/s41598-020-70580-3 https://arxiv.org/abs/2005.13859 Di Benedetto L. , Licciardo GD. , Erlbacher T. , Bauer AJ. , Rubino A. :A 4H-SiC UV Phototransistor with Excellent Optical Gain Based on Controlled Potential Barrier IEEE Transactions on Electron Devices 67 2020 ), S. 154-159 ISSN: 0018-9383 10.1109/TED.2019.2950986 Stolzke T. , Ehrlich S. , Joffe C. , März M. :Comprehensive accuracy examination of electrical power loss measurements of inductive components for frequencies up to 1 MHz Journal of Magnetism and Magnetic Materials 497 2019 ), Art.Nr.: 166022 ISSN: 0304-8853 10.1016/j.jmmm.2019.166022 Hutzler A. , Fritsch B. , Jank M. , Branscheid R. , Martens R. , Spiecker E. , März M. :In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid-Liquid-Gas Interface Advanced Materials Interfaces 6 2019 ), Art.Nr.: 1901027 ISSN: 2196-7350 10.1002/admi.201901027 https://www.onlinelibrary.wiley.com/doi/10.1002/admi.201901027 Beljakowa S. , Pichler P. , Kalkofen B. , Hübner R. :Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon physica status solidi (a) 216 2019 ), Art.Nr.: 1900306 ISSN: 1862-6300 10.1002/pssa.201900306 Rattmann G. , Pichler P. , Erlbacher T. :On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics physica status solidi (a) 216 2019 ), Art.Nr.: 1900167 ISSN: 1862-6300 10.1002/pssa.201900167 Erlekampf J. , Kallinger B. , Weiße J. , Rommel M. , Berwian P. , Friedrich J. , Erlbacher T. :Deeper insight into lifetime-engineering in 4H-SiC by ion implantation Journal of Applied Physics 126 2019 ), Art.Nr.: 045701 ISSN: 0021-8979 10.1063/1.5092429 Hutzler A. , Fritsch B. , Jank MPM. , Branscheid R. , Spiecker E. , März M. :Preparation of Graphene-Supported Microwell Liquid Cells for In Situ Transmission Electron Microscopy Journal of Visualized Experiments 2019 ), Art.Nr.: e59751 ISSN: 1940-087X 10.3791/59751 https://www.jove.com/video/59751/preparation-graphene-supported-microwell-liquid-cells-for-situ?status=a61757k Schriefer T. , Hofmann M. :A hybrid frequency-time-domain approach to determine the vibration fatigue life of electronic devices Microelectronics Reliability 98 2019 ), S. 86-94 ISSN: 0026-2714 10.1016/j.microrel.2019.04.001 Weiße J. , Hauck M. , Krieger M. , Bauer AJ. , Erlbacher T. :Publisher's Note: Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC (AIP Advances (2019) 9 (055308) DOI: 10.1063/1.5096440) AIP Advances 9 2019 ), Art.Nr.: 079901 ISSN: 2158-3226 10.1063/1.5118666 Weiße J. , Hauck M. , Krieger M. , Bauer A. , Erlbacher T. :Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC AIP Advances 9 2019 ), S. 055308 ISSN: 2158-3226 10.1063/1.5096440 Matthus CD. , Di Benedetto L. , Kocher M. , Bauer AJ. , Licciardo GD. , Rubino A. , Erlbacher T. :Feasibility of 4H-SiC p-i-n Diode for Sensitive Temperature Measurements Between 20.5 K and 802 K IEEE Sensors Journal 19 2019 ), S. 2871-2878 ISSN: 1530-437X 10.1109/JSEN.2019.2891293 Hutzler A. , Matthus C. , Dolle C. , Rommel M. , Jank MPM. , Spiecker E. , Frey L. :Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy Journal of Physical Chemistry C 123 2019 ), S. 9192 - 9201 ISSN: 1932-7447 10.1021/acs.jpcc.9b00957 https://pubs.acs.org/doi/10.1021/acs.jpcc.9b00957 Schriefer T. , Hofmann M. , Rauh H. , Eckardt B. , März M. :Parameter study on the electrical contact resistance of axially canted coil springs for high-current systems 2018 29th International Conference on Electrical Contacts together with 64th IEEE Holm Conference on Electrical Contacts (Albuquerque, NM 14. Oktober 2018 - 18. Oktober 2018 )10.1109/HOLM.2018.8611640 Albrecht M. , Erlbacher T. , Bauer A. , Frey L. :Improving 5V digital 4H-SIC CMOS ics for operating at 400°C using PMOS channel implantation Materials Science Forum 2019 ), S. 827-831 ISSN: 0255-5476 10.4028/www.scientific.net/MSF.963.827 Weiße J. , Hauck M. , Sledziewski T. , Krieger M. , Bauer A. , Mitlehner H. , Frey L. , Erlbacher T. :On the origin of charge compensation in aluminum-implanted n-type 4H-SiC by analysis of hall effect measurements 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.433 Stolzke T. , Dirnecker T. , Schwarz J. , Frey L. :Investigation of magnetic properties from a manganese-zinc-ferrite polymer bonded material International Journal of Applied Electromagnetics and Mechanics 59 2019 ), S. 97-104 ISSN: 1383-5416 10.3233/JAE-171244 Di Benedetto L. , Matthus C. , Erlbacher T. , Bauer AJ. , Licciardo GD. , Rubino A. , Frey L. :Performance of 4H-SIC bipolar diodes as temperature sensor at low temperatures 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.572 Rusch O. , Moult J. , Erlbacher T. :Influence of trench design on the electrical properties of 650v 4H-SIC JBS diodes 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.549 Fedorova N. , Macher P. , Jovicic V. , Zbogar-Rasic A. , Delgado A. :Experimental investigation of the gravity influence on the condensation behaviour on Al and PTFE-samples 27. GALA-Fachtagung "Experimentelle Strömungsmechanik" (Erlangen 3. September 2019 - 5. September 2019 )In: A. Delgado, B. Gatternig, M. Münsch, B. Ruck, A. Leder (Hrsg.): Proceedings der 27. GALA-Fachtagung "Experimentelle Strömungsmechanik" 2019 Grünler S. , Rattmann G. , Erlbacher T. , Bauer AJ. , Krach F. , Frey L. :Towards highly integrated, automotive power SoCs using capacitors operating at 100 V implemented in TSV 9th International Conference on Integrated Power Electronics Systems, CIPS 2016 (Nuremberg, DEU 8. März 2016 - 10. März 2016 )In: CIPS 2016 - 9th International Conference on Integrated Power Electronics Systems 2019 Kocher M. , Yao B. , Weiße J. , Rommel M. , Xu ZW. , Erlbacher T. , Bauer A. :Determination of compensation ratios of al-implanted 4H-SIC by tcad modelling of TLM measurements 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.445 Matlok S. , Boettcher N. , Jahn M. , Hörauf P. , Erlbacher T. , Eckardt B. :Retrofitting Wide Band Gap Devices to classic Power Modules using Silicon RC Snubbers 2019 PCIM Europe (Nürnberg 7. Mai 2019 - 9. Mai 2019 )https://www.researchgate.net/publication/331642497_Retrofitting_Wide_Band_Gap_Devices_to_classic_Power_Modules_using_Silicon_RC_Snubbers Weiße J. , Mitlehner H. , Frey L. , Erlbacher T. :Design of a 4H-SIC resurf N-LDMOS transistor for high voltage integrated circuits 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.629 Schlichting H. , Sledziewski T. , Bauer AJ. , Erlbacher T. :Design considerations for robust manufacturing and high yield of 1.2 kv 4H-SIC VDMOS transistors 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.763 Śledziewski T. , Erlbacher T. , Bauer A. , Frey L. , Chen X. , Zhao Y. , Li C. , Dai X. :Comparison between NI-SALICIDE and self-aligned lift-off used in fabrication of ohmic contacts for sic power MOSFET 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.490 Pichler P. , Sledziewski T. , Häublein V. , Bauer AJ. , Erlbacher T. :Channeling in 4H-SiC from an application point of view 12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham 2. September 2018 - 6. September 2018 )In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019 10.4028/www.scientific.net/MSF.963.386 Erdmann A. , Evanschitzky P. , Mesilhy HMS. , Philipsen V. , Hendrickx E. , Bauer M. :Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects? Journal of Micro-Nanolithography MEMS and MOEMS 18 2019 ), Art.Nr.: 011005 ISSN: 1932-5150 10.1117/1.JMM.18.1.011005 Matthus CD. , Bauer AJ. , Frey L. , Erlbacher T. :Wavelength-selective 4H-SiC UV-sensor array Materials Science in Semiconductor Processing 90 2019 ), S. 205-211 ISSN: 1369-8001 10.1016/j.mssp.2018.10.019 Boettcher N. , Heckel T. , Erlbacher T. , Pelaic K. :Silicon RC-Snubber for 900 V Applications Utilising non-Stoichiometric Silicon Nitride 31st IEEE International Symposium on Power Semiconductor Devices and ICs (ISPSD) (Shanghai 19. Mai 2019 - 23. Mai 2019 )In: 31st International Symposium on Power Semiconductor Devices & ICs , NEW YORK 2019 10.1109/ISPSD.2019.8757589 Stolzke T. , Dirnecker T. , Schwarz J. , Frey L. :Investigation of magnetic properties from a manganese–zinc–ferrite polymer bonded material International Journal of Applied Electromagnetics and Mechanics Pre-press 2018 ), S. 1-8 ISSN: 1383-5416 10.3233/JAE-171244 Hutzler A. :Development of advanced liquid cell architectures for high performance in situ transmission electron microscopy in materials sciences 2018 )https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/10092 Hutzler A. , Schmutzler T. , Jank MPM. , Branscheid R. , Unruh T. , Spiecker E. , Frey L. :Unravelling the Mechanisms of Gold−Silver Core−Shell Nanostructure Formation by in Situ TEM Using an Advanced Liquid Cell Design Nano Letters 18 2018 ), S. 7222 - 7229 ISSN: 1530-6984 10.1021/acs.nanolett.8b03388 https://pubs.acs.org/doi/10.1021/acs.nanolett.8b03388 Schrüfer D. , Ellinger M. , Jank M. , Frey L. , Weigel R. , Hagelauer A. :Circuits with Scaled Metal Oxide Technology for Future TOLAE RF Systems European Microwave Conference (Madrid 23. September 2018 - 28. September 2018 )In: Proceedings of the 48th European Microwave Conference 2018 Schriefer T. , Hofmann M. , März M. :Vibrational resistance investigation of an IGBT gate driver utilizing Frequency Response Analysis (FRA) and Highly Accelerated Life Test (HALT) 2018 10th International Conference on Integrated Power Electronics Systems (CIPS) (Stuttgart 20. März 2018 - 22. März 2018 )https://ieeexplore.ieee.org/document/8403138 Weiße J. , Hauck M. , Sledziewski T. , Tschiesche M. , Krieger M. , Bauer A. , Mitlehner H. , Frey L. , Erlbacher T. :Analysis of Compensation Effects in Aluminum-Implanted 4H-SiC Devices Materials Science Forum 924 2018 ), S. 184-187 ISSN: 0255-5476 10.4028/www.scientific.net/MSF.924.184 Schneidereit D. , Tschernich J. , Friedrich O. , Scharin-Mehlmann M. , Gilbert D. :3D-Printed Reusable Cell Culture Chamber with Integrated Electrodes for Electrical Stimulation and Parallel Microscopic Evaluation 3D Printing and Additive Manufacturing 5 2018 ), S. 115-125 ISSN: 2329-7662 10.1089/3dp.2017.0103 Schriefer T. , Hofmann M. :Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (Toulouse 15. April 2018 - 18. April 2018 )10.1109/EuroSimE.2018.8369868 https://ieeexplore.ieee.org/document/8369868 Hutzler A. , Matthus C. , Rommel M. , Jank M. , Frey L. :Large-Area Layer Counting of 2D Materials via Visible Reflection Spectroscopy 19th International Microscopy Congress (IMC19) (Sydney 9. September 2018 - 14. September 2018 )https://abstracts.imc19.com/pdf/abstract_497.pdf Unterreitmeier M. , Nagler O. , Pfitzner L. , Weigel R. , Holmer R. :An acoustic emmission sensor system for thin layer crack detection 29th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (Aalborg 1. Oktober 2018 - 5. Oktober 2018 )Huerner A. , Heckel T. , Endruschat A. , Erlbacher T. , Bauer AJ. , Frey L. :Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 10.4028/www.scientific.net/MSF.924.901 Erlbacher T. , Huerner A. , Zhu Y. , Bach L. , Schletz A. , Zuerbig V. , Pinti L. , Kirste L. , Giese C. , Nebel CE. , Bauer AJ. , Frey L. :Electrical properties of schottky-diodes based on B doped diamond International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 10.4028/www.scientific.net/MSF.924.931 Bilbao-Guillerna A. , Thiruvallur Eachambadi R. , Cadot GBJ. , Axinte DA. , Billingham J. , Stumpf F. , Stumpf F. , Beuer S. , Rommel M. :Novel Approach Based on Continuous Trench Modelling to Predict Focused Ion Beam Prepared Freeform Surfaces Journal of Materials Processing Technology 2018 )ISSN: 0924-0136 10.1016/j.jmatprotec.2017.10.024 Förthner M. , Girschikofsky M. , Rumler M. , Stumpf F. , Rommel M. , Hellmann R. , Frey L. :One-step nanoimprinted Bragg grating sensor based on hybrid polymers Sensors and Actuators A-Physical 283 2018 ), S. 298-304 ISSN: 0924-4247 10.1016/j.sna.2018.09.053 Lomakin K. , Pavlenko T. , Ankenbrand M. , Sippel M. , Ringel J. , Scheetz M. , Klemm T. , Gräf D. , Helmreich K. , Franke J. , Gold G. :Evaluation and Characterization of 3D Printed Pyramid Horn Antennas utilizing different Deposition Techniques for Conductive Material IEEE Transactions on Components, Packaging and Manufacturing Technology 2018 ), S. 1-1 ISSN: 2156-3950 10.1109/tcpmt.2018.2871931 Steinberger M. , Geiling J. , Oechsner R. , Frey L. :Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas Applied Energy 232 2018 ), S. 572-582 ISSN: 0306-2619 10.1016/j.apenergy.2018.10.004 Matthus C. , Hürner A. , Erlbacher T. , Bauer AJ. , Frey L. :Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes Solid-State Electronics 2018 ), S. 101-105 ISSN: 0038-1101 10.1016/j.sse.2018.03.010 Nouibat TH. , Messai Z. , Chikouch D. , Ouennoughi Z. , Rouag N. , Rommel M. , Frey L. :Normalized differential conductance to study current conduction mechanisms in MOS structures Microelectronics Reliability 91 2018 ), S. 183-187 ISSN: 0026-2714 10.1016/j.microrel.2018.10.001 Rosenberger M. , Girschikofsky M. , Förthner M. , Belle S. , Rommel M. , Frey L. , Schmauß B. , Hellmann R. :TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing Journal of Optics 20 2018 ), Art.Nr.: 01LT02 ISSN: 2040-8978 10.1088/2040-8986/aa9bcf Kalkofen B. , Ahmed B. , Beljakowa S. , Lisker M. , Kim YS. , Burte EP. :Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures 18th IEEE International Conference on Nanotechnology (IEEE-NANO) (Cork 23. Juli 2018 - 26. Juli 2018 )In: 2018 IEEE 18TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) , NEW YORK 2018 Erlekampf J. , Kaminzky D. , Rosshirt K. , Kallinger B. , Rommel M. , Berwian P. , Friedrich J. , Frey L. :Influence and mutual interaction of process parameters on the Z1/2defect concentration during epitaxy of 4H-SiC International Conference on Silicon Carbide and Related Materials, ICSCRM 2017 10.4028/www.scientific.net/MSF.924.112 Girschikofsky MG. , Rosenberger M. , Förthner M. , Rommel M. , Frey L. , Hellmann R. :Flexible thin film bending sensor based on Bragg gratings in hybrid polymers Optical Sensing and Detection V 2018 10.1117/12.2303820 Distler F. , Oppelt D. , Schür JS. , Vossiek M. :Design and characterization of a compact and robust shielded dielectric waveguide for mmW applications In: Proceedings of the GeMiC 2018 - The 11th German Microwave Conference (GeMiC 2018) 2018 10.23919/gemic.2018.8335108 Zörner A. , Oertel S. , Jank M. , Frey L. , Langenstein B. , Bertsch T. :Human Sweat Analysis Using a Portable Device Based on a Screen-printed Electrolyte Sensor Electroanalysis 30 2018 ), S. 665-671 ISSN: 1040-0397 10.1002/elan.201700672 Yu Z. , Zeltner S. , Boettcher N. , Rattmann G. , Leib J. , Bayer C. , Schletz A. , Erlbacher T. , Frey L. :Heterogeneous Integration of Vertical GaN Power Transistor on Si Capacitor for DC-DC Converters 7th Electronic System-Integration Technology Conference, ESTC 2018 10.1109/ESTC.2018.8546362 Scharin-Mehlmann M. , Häring A. , Rommel M. , Dirnecker T. , Friedrich O. , Frey L. , Gilbert D. :Nano- and micro-patterned S-, H-, and X-PDMS for cell-based applications: Comparison of wettability, roughness, and cell-derived parameters Frontiers in Bioengineering and Biotechnology 6 2018 ), Art.Nr.: 51 ISSN: 2296-4185 10.3389/fbioe.2018.00051 Girschikofsky MG. , Rosenberger M. , Förthner M. , Rommel M. , Frey L. , Hellmann R. :Waveguide Bragg Gratings in Ormocer®s for Temperature Sensing Sensors 17 2017 ), Art.Nr.: 2459 ISSN: 1424-8220 10.3390/s17112459 Schimmel S. , Koch M. , Macher P. , Kimmel AC. , Steigerwald T. , Alt N. , Schlücker E. , Wellmann P. :Solubility and dissolution kinetics of GaN in supercritical ammonia in presence of ammonoacidic and ammonobasic mineralizers Journal of Crystal Growth 479 2017 ), S. 59-66 ISSN: 0022-0248 10.1016/j.jcrysgro.2017.09.027 Hutzler A. , Branscheid R. , Schmutzler T. , Jank M. , Frey L. , Spiecker E. :Controlled silver-shell growth on gold nanorods studied by in situ liquid cell TEM techniques Microscopy Conference 2017 (Lausanne 21. August 2017 - 25. August 2017 )In: Microscopy Conference 2017 (MC 2017) - Proceedings 2017 https://epub.uni-regensburg.de/36099/ Hutzler A. , Matthus C. , Rommel M. , Frey L. :Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers Applied Physics Letters 110 2017 ), Art.Nr.: 021909 ISSN: 0003-6951 10.1063/1.4973968 Förthner M. , Papenheim M. , Rumler M. , Stumpf F. , Baier L. , Rommel M. , Scheer HC. , Frey L. :Polymerization related deformations in multilayer soft stamps for nanoimprint Journal of Applied Physics 122 2017 ), Art.Nr.: 165305 ISSN: 0021-8979 10.1063/1.5001463 Rosenberger M. , Roth G-. , Adelmann B. , Schmauß B. , Hellmann R. :Temperature Referenced Planar Bragg Grating Strain Sensor in fs-Laser Cut COC Specimen IEEE Photonics Technology Letters 2017 )ISSN: 1041-1135 10.1109/LPT.2017.2693401 Häublein V. , Birnbaum E. , Ryssel H. , Frey L. , Djupmyr M. :Ion Implantation of Polypropylene Films for the Manufacture of Thin Film Capacitors 21st International Conference on Ion Implantation Technology, IIT 2016 10.1109/IIT.2016.7882887 Matthus C. , Burenkov A. , Erlbacher T. :Optimization of 4H-SiC photodiodes as selective UV sensors Materials Science Forum 2017 ), S. 622-625 ISSN: 0255-5476 10.4028/www.scientific.net/MSF.897.622 Albrecht M. , Hürner A. , Erlbacher T. , Bauer A. , Frey L. :Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET Materials Science Forum 897 2017 ), S. 665-668 ISSN: 0255-5476 10.4028/www.scientific.net/MSF.897.665 Girschikofsky MG. , Förthner M. , Rommel M. , Frey L. , Hellmann R. :Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides Integrated Optics: Devices, Materials, and Technologies XXI 2017 10.1117/12.2249665 Matthus C. , Erlbacher T. , Schöfer B. , Bauer A. , Frey L. :Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration Materials Science Forum 2017 ), S. 618-621 ISSN: 0255-5476 10.4028/www.scientific.net/MSF.897.618 Steinberg C. , Rumler M. , Manuel RA. , Papenheim M. , Wang S. , Mayer A. , Becker M. , Rommel M. , Scheer HC. :Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques Microelectronic Engineering 176 2017 ), S. 22-27 ISSN: 0167-9317 10.1016/j.mee.2017.01.009 Hürner A. , Erlbacher T. , Bauer A. , Frey L. :Monolithically integrated solid-state-circuit-breaker for high power applications 11th European Conference on Silicon Carbide and Related Materials, ECSCRM 2016 10.4028/www.scientific.net/MSF.897.661 Matthus C. , Erlbacher T. , Hess A. , Bauer AJ. , Frey L. :Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 °C IEEE Transactions on Electron Devices 64 2017 ), S. 3399-3404 ISSN: 0018-9383 10.1109/TED.2017.2711271 Banzhaf S. , Kenntner J. , Grieb M. , Schwaiger S. , Erlbacher T. , Bauer AJ. , Frey L. :Stress reduction in high voltage MIS capacitor fabrication 19th International Symposium on Power Electronics, Ee 2017 10.1109/PEE.2017.8171664 Meister T. , Ellinger F. , Bartha JW. , Berroth M. , Burghartz J. , Claus M. , Frey L. , Gagliardi A. , Grundmann M. , Hesselbarth J. , Klauk H. , Leo K. , Lugli P. , Mannsfeld S. , Manoli Y. , Negra R. , Neumaier D. , Pfeiffer U. , Riedl T. , Scheinert S. , Scherf U. , Thiede A. , Tröster G. , Vossiek M. , Weigel R. , Wenger C. , Alavi G. , Becherer M. , Chavarin CA. , Darwish M. , Ellinger M. , Fan CY. , Fritsch M. , Grotjahn F. , Gunia M. , Haase K. , Hillger P. , Ishida K. , Jank M. , Knobelspies S. , Kuhl M. , Lupina G. , Naghadeh SM. , Münzenrieder N. , Özbek S. , Rasteh M. , Salvatore GA. , Schrüfer D. , Strobel C. , Theisen M. , Tuckmantel C. , Von Wenckstern H. , Wang Z. , Zhang Z. :Program FFlexCom - High frequency flexible bendable electronics for wireless communication systems In: 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS) 2017 10.1109/COMCAS.2017.8244733 Hutzler A. , Branscheid R. , Jank M. , Frey L. , Spiecker E. :Graphene‐supported microwell liquid cell for in situ studies in TEM and SEM European Microscopy Congress 2016 (Lyon 28. 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Smith, Giovanni Squillero (Hrsg.): Applications of Evolutionary Computing - EvoWorkshops 2004: EvoBIO, EvoCOMNET, EvoHOT, EvoISAP, EvoMUSART, and EvoSTOC , Berlin Heidelberg 2004 10.1007/978-3-540-24653-4_22 Frey L. , Rambach M. , Weiss R. , Bauer A. , Ryssel H. :Investigation of rapid thermal annealed pn-junctions in SiC 2004 https://www.scopus.com/record/display.uri?eid=2-s2.0-8744264042&origin=inward Lemberger M. , Paskaleva A. , Zürcher S. , Bauer A. , Frey L. , Ryssel H. :Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors Microelectronic Engineering 72 2004 ), S. 315-320 ISSN: 0167-9317 10.1016/j.mee.2004.01.010 Weiss R. , Frey L. , Ryssel H. :Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics 2004 https://www.scopus.com/record/display.uri?eid=2-s2.0-8644276383&origin=inward Schmidt C. , Petrik P. , Schneider C. , Fried M. , Löhner T. , Bársony I. , Gyulai J. , Ryssel H. :Optical Characterization of Ferroelectric Strontium-Bismut-Tantalate (SBT) Thin Films Thin Solid Films 455-456 2004 ), S. 495-499 ISSN: 0040-6090 10.1016/j.tsf.2003.11.248 Yasenov NN. , Berberich SE. , Frey L. , Ryssel H. :Design, fabrication and characterization of a microactuator for nebulization of fluids Paskaleva A. , Bauer A. , Lemberger M. , Zürcher S. :Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios 10.1063/1.1702101 Nguyen PH. , Lorenz J. , Baer E. , Ryssel H. :Modeling of Chemical-Mechanical Polishing on Patterned Wafers as Part of Integrated Topography Process Simulation MAM2004 (Leuven, Belgium 7. 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Accelerators, Spectrometers, Detectors and Associated Equipment 382 1996 ), S. 332-334 ISSN: 0168-9002 10.1016/S0168-9002(96)00701-2 Lipp S. , Frey L. , Lehrer C. , Demm E. , Pauthner S. , Ryssel H. :A comparison of focused ion beam and electron beam induced deposition processes Microelectronics Reliability 36 1996 ), S. 1779-1782 ISSN: 0026-2714 https://www.scopus.com/record/display.uri?eid=2-s2.0-0030274008∨igin=inward Bogen S. , Herden M. , Frey L. , Ryssel H. :Reduction of lateral parasitic current flow by buried recombination layers formed by high energy implantation of C or O into silicon Proceedings of the 1996 11th International Conference on Ion Implantation Technology (Austin, TX, USA In: Ishida E.; Mehta S.; Banerjee S.; Current M.; Smith T.C.; et al (Hrsg.): Proceedings of the 1996 11th International Conference on Ion Implantation Technology , Piscataway, NJ, United States 1996 https://www.scopus.com/record/display.uri?eid=2-s2.0-0030373286∨igin=inward Frey L. , Bogen S. , Herden M. , Ryssel H. :Deep implants for semiconductor device applications Radiation Effects and Defects in Solids 140 1996 ), S. 87-101 ISSN: 1042-0150 10.1080/10420159608212943 Lipp S. , Frey L. , Lehrer C. , Frank B. , Demm E. , Pauthner S. , Ryssel H. :Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition Journal of Vacuum Science & Technology B 14 1996 ), S. 3920-3923 ISSN: 1071-1023 https://www.scopus.com/record/display.uri?eid=2-s2.0-0000353753∨igin=inward Lipp S. , Frey L. , Lehrer C. , Frank B. , Demm E. , Ryssel H. :Investigations on the topology of structures milled and etched by focused ion beams Journal of Vacuum Science & Technology B 14 1996 ), S. 3996-3999 ISSN: 1071-1023 https://www.scopus.com/record/display.uri?eid=2-s2.0-0001398692∨igin=inward Lipp S. , Frey L. , Franz G. , Demm E. , Petersen S. , Ryssel H. :Local material removal by focused ion beam milling and etching Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 1995 ), S. 630-635 ISSN: 0168-583X 10.1016/0168-583X(95)00778-4 Frey L. , Ryssel H. , Bogen S. , Hobler G. , Simionescu A. :Model for the electronic stopping of channeled ions in silicon around the stopping power maximum Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 1995 ), S. 47-50 ISSN: 0168-583X 10.1016/0168-583X(95)00676-1 Bogen S. , Körber K. , Gong L. , Frey L. , Ryssel H. :Comparison of retrograde and conventional p-wells in regard of latch-up susceptibility Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 96 1995 ), S. 411-415 ISSN: 0168-583X 10.1016/0168-583X(94)00530-3 Gong L. , Petersen S. , Frey L. , Ryssel H. :Improved delineation technique for two dimensional dopant profiling Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 96 1995 ), S. 133-138 ISSN: 0168-583X 10.1016/0168-583X(94)00472-2 Gyulai J. , Ryssel H. , Biró L. , Frey L. , Kuki A. , Kormány T. , Serfozo G. , Khanh N. :Athermal effects in ion implanted layers Radiation Effects and Defects in Solids 127 1994 ), S. 397-404 ISSN: 1042-0150 10.1080/10420159408221047 Gong L. , Bogen S. , Frey L. , Jung W. , Ryssel H. :Analytical description of high energy implantation profiles of boron and phosphorus into crystalline silicon Radiation Effects and Defects in Solids 127 1994 ), S. 385-395 ISSN: 1042-0150 10.1080/10420159408221046 Frey L. , Pichler P. , Kasko I. , Thies I. , Lipp S. , Streckfuss N. , Gong L. , Ryssel H. :Practical aspects of ion beam analysis of semiconductor structures Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85 1994 ), S. 356-362 ISSN: 0168-583X 10.1016/0168-583X(94)95844-0 Biró L. , Gyulai J. , Bogen S. , Frey L. , Ryssel H. :Investigation of the effect of altered defect structure produced by photon assisted implantation on the diffusion of As in silicon during thermal annealing Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85 1994 ), S. 925-928 ISSN: 0168-583X 10.1016/0168-583X(94)95952-8 Biró L. , Gyulai J. , Ryssel H. , Frey L. , Kormány T. , Tuan N. , Horváth z. :Photon assisted implantation (PAI) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 ), S. 607-611 ISSN: 0168-583X 10.1016/0168-583X(93)96191-E Bogen S. , Gong L. , Frey L. , Ryssel H. :High energy implantation of 10B and 11B into (100) silicon in channel and in random direction Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 ), S. 659-662 ISSN: 0168-583X 10.1016/0168-583X(93)96203-O Kroninger F. , Streckfuss N. , Frey L. , Falter T. , Ryzlewicz C. , Pfitzner L. , Ryssel H. :Application of advanced contamination analysis for qualification of wafer handling systems and chucks Applied Surface Science 63 1993 ), S. 93-98 ISSN: 0169-4332 10.1016/0169-4332(93)90070-R Ryssel H. , Frey L. , Streckfuss N. , Schork R. , Kroninger F. , Falter T. :Contamination control and ultrasensitive chemical analysis Applied Surface Science 63 1993 ), S. 79-87 ISSN: 0169-4332 10.1016/0169-4332(93)90068-M Gong L. , Frey L. , Bogen S. , Ryssel H. :A novel delineation technique for 2D-profiling of dopants in crystalline silicon Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 74 1993 ), S. 186-190 ISSN: 0168-583X 10.1016/0168-583X(93)95040-C Frey L. , Ergele W. , Falter T. , Gong L. , Ryssel H. :Analysis of microstructured samples by focused ion beam sample preparation Microelectronic Engineering 21 1993 ), S. 375-378 ISSN: 0167-9317 10.1016/0167-9317(93)90095-M Kasko I. , Dehm C. , Frey L. , Ryssel H. :Effect of ion-beam mixing temperature on cobalt silicide formation Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1993 ), S. 786-789 ISSN: 0168-583X 10.1016/0168-583X(93)90682-V Gong L. , Bogen S. , Frey L. , Jung W. , Ryssel H. :Simulation of high energy implantation profiles in crystalline silicon Microelectronic Engineering 1992 ), S. 495-498 ISSN: 0167-9317 10.1016/0167-9317(92)90482-7 Streckfusse N. , Frey L. , Zielonka G. , Kroninger F. , Ryzlewicz C. , Ryssel H. :Analysis of trace metals on silicon surfaces Fresenius Zeitschrift für Analytische Chemie 343 1992 ), S. 765-768 ISSN: 0016-1152 10.1007/BF00633562 Frey L. , Kroninger F. , Streckfusse N. , Ryssel H. , Margail J. :Characterization of metal impurities in silicon-on-insulator material Materials Science and Engineering B-Advanced Functional Solid-State Materials 12 1992 ), S. 195-198 ISSN: 0921-5107 10.1016/0921-5107(92)90285-H Antos L. , Gyulai J. , Khanh N. , Frey L. :End-of-range disorder influenced by inherent oxygen in silicon Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 71 1992 ), S. 399-405 ISSN: 0168-583X 10.1016/0168-583X(92)95357-W Frey L. , Bogen S. , Gong L. , Jung W. , Ryssel H. , Gyulai J. :High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 62 1992 ), S. 410-415 ISSN: 0168-583X 10.1016/0168-583X(92)95267-U Oechsner R. , Kluge A. , Frey L. , Ryssel H. :Tribological properties of carbonized photoresist Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 ), S. 793-797 ISSN: 0168-583X 10.1016/0168-583X(91)95706-J Gyulai J. , Frey L. , Ryssel H. , Khanh N. :Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon Journal of Materials Research 6 1991 ), S. 1695-1700 ISSN: 0884-2914 10.1557/JMR.1991.1695
