Dr. Tobias Dirnecker

2022

• Marhenke J., Dirnecker T., Vogel N., Rommel M.:
  Increasing flow rates in polydimethylsiloxane-based deterministic lateral displacement devices for sub-micrometer particle separation
  In: Microfluidics and Nanofluidics 27 (2022), Art.Nr.: 2
  ISSN: 1613-4982
  DOI: 10.1007/s10404-022-02609-0

2019

• Stolzke T., Dirnecker T., Schwarz J., Frey L.:
  Investigation of magnetic properties from a manganese-zinc-ferrite polymer bonded material
  In: International Journal of Applied Electromagnetics and Mechanics 59 (2019), S. 97-104
  ISSN: 1383-5416
  DOI: 10.3233/JAE-171244

2018

• Scharin-Mehlmann M., Häring A., Rommel M., Dirnecker T., Friedrich O., Frey L., Gilbert D.:
  Nano- and micro-patterned S-, H-, and X-PDMS for cell-based applications: Comparison of wettability, roughness, and cell-derived parameters
  In: Frontiers in Bioengineering and Biotechnology 6 (2018), Art.Nr.: 51
  ISSN: 2296-4185
  DOI: 10.3389/fbioe.2018.00051
• Stolzke T., Dirnecker T., Schwarz J., Frey L.:
  Investigation of magnetic properties from a manganese–zinc–ferrite polymer bonded material
  In: International Journal of Applied Electromagnetics and Mechanics Pre-press (2018), S. 1-8
  ISSN: 1383-5416
  DOI: 10.3233/JAE-171244

2014

• Scharin M., Rommel M., Dirnecker T., Marhenke J., Herrmann B., Rumler M., Fader R., Frey L., Herrmann M.:
  Bioactivation of plane and patterned PDMS thin films by wettability engineering
  In: BioNanoScience 4 (2014), S. 251-262
  ISSN: 2191-1630
  DOI: 10.1007/s12668-014-0145-6

2007

• Lemberger M., Schön F., Dirnecker T., Jank M., Frey L., Ryssel H., Paskaleva A., Zürcher S., Bauer A.:
  MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications
  In: Chemical Vapor Deposition 13 (2007), S. 105-111
  ISSN: 0948-1907
  DOI: 10.1002/cvde.200606511

2006

• Dirnecker T., Ryssel H.:
  Untersuchung von Aufladungseffekten bei der Ionenimplantation
  Aachen: Shaker Verlag, 2006
  (Erlanger Berichte Mikroelektronik)
  ISBN: 3-8322-5081-6

2005

• Lemberger M., Schön F., Dirnecker T., Jank M., Paskaleva A., Bauer A., Frey L., Ryssel H.:
  High-k Hafnium Silicate Films on Silicon and Germanium Wafers by MOCVD Using a Single-Source Precursor
  In: Proceedings of the 15th European Conference on Chemical Vapor Deposition (EUROCVD-15), Electrochemical Society, -: The Electrochemical Society, Inc., 2005, S. 873

2003

• Dirnecker T., Frey L., Bauer A., Ryssel H., Ruf A., Henke D., Beyer A.:
  Influence of Antenna Shape and Resist Patterns on Charging Damage During Ion Implantation
  Ion Implantation Technology (Taos, New Mexico, USA)
  In: IEEE Proc. on Ion Implantation Technology-2002, Piscataway: 2003
  DOI: 10.1109/IIT.2002.1257996
• Henke D., Walther S., Weemann J., Dirnecker T., Ruf A., Beyer A., Lee K.:
  Characterization of charging damage in plasma doping
  Ion Implantation Technology (Taos, New Mexico, USA)
  In: IEEE Proc. on Ion Implantation TEchnology-2002, Piscataway: 2003
  DOI: 10.1109/IIT.2002.1257973

2002

• Beyer A., Hausmann A., Junack M., Radecker J., Ruf A., Dirnecker T.:
  Plasma induced damage monitoring for HDP processes
  7th Int. Symp. On Plasma & Process Induced Damage (Maui, Hawaii, USA)
  In: Proc. 7th Int. Symp. On Plasma & Process Induced Damage, Santa Clara, USA: 2002
  DOI: 10.1109/PPID.2002.1042615
• Dirnecker T., Ruf A., Frey L., Beyer A., Bauer A., Henke D., Ryssel H.:
  Influence of photoresist pattern on charging damage during high current ion implantation
  7th International Symposium on Plasma- and Process-Induced Damage, P2ID 2002
  DOI: 10.1109/PPID.2002.1042620