2026
- , , , , , :
Probing crystal axis orientation of birefringent materials via polarized microspectroscopy and anisotropic optical modeling
In: JPhys Photonics 8 (2026), S. 015029
ISSN: 2515-7647
DOI: 10.1088/2515-7647/ae2e68
2025
- :
Modellierung mikrospektroskopischer Reflektanz- und Transmittanzmessungen zur Brechungsindex-Bestimmung (Masterarbeit, 2025) - , , , :
Self-organised ordering of scandium into basal monolayers of aluminium nitride and its implication for the growth of well-crystallized (Al,Sc)N materials for electronic devices
In: Journal of Materials Chemistry C (2025)
ISSN: 2050-7526
DOI: 10.1039/d4tc04545a - , , :
Growth kinetics - a key aspect of every semiconductor synthesis
13th annual meeting of the young crystal growers (jDGKK) (Frankfurt am Main, 4. März 2025 - 4. März 2025) - , , , , :
Fault Detection and Mitigation of DC/DC Converters with Semiconductor-Based Isolation for DC-EVSEs
2025 IEEE Seventh International Conference on DC Microgrids (ICDCM) (, 4. Juni 2025 - 6. Juni 2025)
In: 2025 IEEE Seventh International Conference on DC Microgrids (ICDCM) 2025
DOI: 10.1109/ICDCM63994.2025.11144678 - , , , , , , :
Impact of Inhomogeneous Offcut Angles of GaN Native Substrates on Lateral Current Modulation in AlGaN Barrier Layers
In: Crystal Research and Technology (2025)
ISSN: 0232-1300
DOI: 10.1002/crat.202400245 - , , , , , , , , , , :
Fluoride-Induced Corrosion of Stainless Steel: A Case Study for its Application as Proton Exchange Membrane Water Electrolysis Bipolar Plate Material
In: Chemsuschem (2025)
ISSN: 1864-5631
DOI: 10.1002/cssc.202501561 - , , , , , , , , , :
Platinum interlayers reduce charge transport barriers between amorphous Ir-oxide OER electrocatalysts and the porous transport layer
In: Chemical Engineering Journal 514 (2025), Art.Nr.: 162887
ISSN: 1385-8947
DOI: 10.1016/j.cej.2025.162887 - , , , , , :
Quantum efficiency scaling by cascaded Ge multi-stage tunnel junctions
In: Journal of Lightwave Technology 43 (2025), S. 8825-8831
ISSN: 0733-8724
DOI: 10.1109/JLT.2025.3589018 - , , , , , , :
Determination of the scattering length (Γ → L) by the electrically pumped Germanium Zener Emitter
In: IEEE Photonics Technology Letters (2025)
ISSN: 1041-1135
DOI: 10.1109/LPT.2025.3549829 - , :
A Novel Design Variation of a Monolithically Integrated SiC Circuit Breaker
48th MIPRO ICT and Electronics Convention, MIPRO 2025 (Opatija, 2. Juni 2025 - 6. Juni 2025)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2025 MIPRO 48th ICT and Electronics Convention, MIPRO 2025 - Proceedings 2025
DOI: 10.1109/MIPRO65660.2025.11131705 - , , , , :
600 °C Operation of a LDMOS Integrated on a 4H-SiC CMOS Platform
48th MIPRO ICT and Electronics Convention, MIPRO 2025 (Opatija, 2. Juni 2025 - 6. Juni 2025)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2025 MIPRO 48th ICT and Electronics Convention, MIPRO 2025 - Proceedings 2025
DOI: 10.1109/MIPRO65660.2025.11131887 - , , , , , , , , , :
Direct investigation of localized leakage currents in GaN-on-sapphire pn-diodes
In: Scientific Reports 15 (2025), Art.Nr.: 39578
ISSN: 2045-2322
DOI: 10.1038/s41598-025-25338-0 - , , :
Physics-informed deep learning for 3D modeling of light diffraction from optical metasurfaces
In: Optics Express 33 (2025), S. 1371-1384
ISSN: 1094-4087
DOI: 10.1364/OE.544116 - , , , :
Fuel Cell systems in hybrid-electric aircraft
European Electrolyser & Fuel Cell Forum (EFCF) (Luzern)
In: European Electrolyser & Fuel Cell Forum (EFCF) 2025
DOI: 10.5281/zenodo.17476245 - , , , , :
Enhanced Efficiency and Power Density in Next-Gen Power Electronics Through Zero Overvoltage Switching
2025 Energy Conversion Congress & Expo Europe (ECCE Europe) (Birmingham, 1. September 2025 - 4. September 2025)
In: 2025 Energy Conversion Congress & Expo Europe (ECCE Europe), New York City: 2025
DOI: 10.1109/ECCE-Europe62795.2025.11238816 - , , , , :
Modeling the partially detected backside reflectance of transparent substrates in reflectance microspectroscopy
In: Micron 198 (2025), S. 103878
ISSN: 0968-4328
DOI: 10.1016/j.micron.2025.103878 - , , , , , , , , , :
Spectro-Spatial Unmixing in Optical Microspectroscopy for Thickness Determination of Layered Materials
In: Advanced Optical Materials 13 (2025), Art.Nr.: 2402502
ISSN: 2195-1071
DOI: 10.1002/adom.202402502 - , , , :
Empirical Modelling of Tunneling Processes in 4H-SiC Gated Pin-Diodes
48th MIPRO ICT and Electronics Convention, MIPRO 2025 (Opatija, 2. Juni 2025 - 6. Juni 2025)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2025 MIPRO 48th ICT and Electronics Convention, MIPRO 2025 - Proceedings 2025
DOI: 10.1109/MIPRO65660.2025.11131817 - , :
Modeling the Tripping Behavior of Fuses Based on Data Sheet Characteristics and Conductor Material Properties
In: Electricity 6 (2025), S. 47
DOI: 10.3390/electricity6030047 - , , , :
Electroluminescent Behavior of Defects in 4H-SiC Light Emitting Diodes
48th MIPRO ICT and Electronics Convention, MIPRO 2025 (Opatija, 2. Juni 2025 - 6. Juni 2025)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2025 MIPRO 48th ICT and Electronics Convention 2025
DOI: 10.1109/MIPRO65660.2025.11132079 - , , :
Fabrication and Electrical Characterization of Pure Boron on 4H-SiC Junctions
48th MIPRO ICT and Electronics Convention, MIPRO 2025 (Opatija, 2. Juni 2025 - 6. Juni 2025)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2025 MIPRO 48th ICT and Electronics Convention 2025
DOI: 10.1109/MIPRO65660.2025.11132043 - , , , , :
Emerging research directions in the field of nitride semiconductors
13th annual meeting of the young crystal growers (jDGKK) (Frankfurt am Main, 4. März 2025) - , , , :
Numerical and experimental analysis of ammonothermal crystal growth configurations and their impact on the temperature field along the autoclave wall
International Conference on Nitride Semiconductors - ICNS-15 (Malmö, 6. Juli 2025 - 11. Juli 2025)
In: MIKON (Hrsg.): ABSTRACT BOOKLET ICNS 15 2025
Open Access: https://files.mkon.nu/fmfiles/file/Abstractbook_ICNS15_020725_updated-1.pdf
2024
- , , :
Integrated Mask Process Modeling for Better Yield Predictions
Photomask Technology 2024 (Monterey, CA, 30. September 2024 - 3. Oktober 2024)
In: Seong-Sue Kim, Lawrence S. Melvin (Hrsg.): Proceedings of SPIE - The International Society for Optical Engineering 2024
DOI: 10.1117/12.3035191 - Guiot E., Allibert F., Leib J., Becker T., Drouin A., Schwarzenbach W.:
SiC engineered substrate: increasing SiC MOSFETs current density from device to module level
39th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2024
DOI: 10.1109/APEC48139.2024.10509052 - , :
Fundamentals of ammonothermal growth of nitride crystals
12th Annual jDGKK Meeting (Erlangen, 5. März 2024 - 5. März 2025) - , , , , , :
Modelling-Augmented Failure Diagnostics in Planar SiC MOS Devices Using TDDB Measurements
In: Solid State Phenomena 361 (2024), S. 93-98
ISSN: 1012-0394
DOI: 10.4028/p-jbV5Vq - :
Analyse und Modellierung mikrospektrometrischer Messungen an Dünnschichtsystemen unter Einsatz von Polarisationsoptiken (Masterarbeit, 2024) - , , , , , :
In situ, non-invasive novel measurement method for the determination of integrated waveguide losses
Metamaterials, Metadevices, and Metasystems 2024 (San Diego, CA, 18. August 2024 - 22. August 2024)
In: Nader Engheta, Mikhail A. Noginov, Nikolay I. Zheludev, Nikolay I. Zheludev (Hrsg.): Proceedings of SPIE - The International Society for Optical Engineering 2024
DOI: 10.1117/12.3028025 - , , , , , :
Utilizing direct Zener tunneling in Germanium for cryogenic quantum applications
In: Materials Science in Semiconductor Processing 172 (2024), Art.Nr.: 108057
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2023.108057 - , , , , , , , , , , , , , , , , , , :
Photodeposition-Based Synthesis of TiO2@IrOx Core–Shell Catalyst for Proton Exchange Membrane Water Electrolysis with Low Iridium Loading
In: Advanced Science (2024)
ISSN: 2198-3844
DOI: 10.1002/advs.202402991 - , , , :
Simulation-Guided Analysis towards Trench Depth Optimization for Enhanced Flexibility in Stretch-Free, Shape-Induced Interconnects for Flexible Electronics
In: Materials 17 (2024), Art.Nr.: 3849
ISSN: 1996-1944
DOI: 10.3390/ma17153849 - , , , , , , , , :
Precise Compensation of Device Variability in IGZO-based Ferroelectric ThinFilm Transistors for Enhanced Transparent Display Performance
International Symposium, Seminar, and Exhibition, Display Week 2024 (San Jose, CA, USA, 12. Mai 2024 - 17. Mai 2024)
In: Digest of Technical Papers - SID International Symposium 2024
DOI: 10.1002/sdtp.17463 - , , :
Ab Initio Calculations to Determine Tunneling Parameters for 4H-SiC Tunneling Field-Effect Transistor Simulations
47th ICT and Electronics Convention, MIPRO 2024 (Opatija, HRV, 20. Mai 2024 - 24. Mai 2024)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Dragan Cisic, Pavle Ergovic, Tihana Galinac Grbac, Vera Gradisnik, Stjepan Gros, Andrej Jokic, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Marko Svaco, Edvard Tijan, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2024 47th ICT and Electronics Convention, MIPRO 2024 - Proceedings 2024
DOI: 10.1109/MIPRO60963.2024.10569785 - , , , , , , :
A 4H-SiC CMOS Technology enabling Smart Sensor Integration and Circuit Operation above 500 °C
2024 Smart Systems Integration Conference and Exhibition, SSI 2024 (Hamburg, 16. April 2024 - 18. April 2024)
In: 2024 Smart Systems Integration Conference and Exhibition, SSI 2024 2024
DOI: 10.1109/SSI63222.2024.10740550 - , , :
Very High Temperature Hall Sensors in a Wafer-Scale 4H-SiC Technology
In: Advanced Materials Technologies (2024)
ISSN: 2365-709X
DOI: 10.1002/admt.202400046 - , , , , , , :
Supported Ruthenium Phosphide as a Promising Catalyst for Selective Hydrogenation of Sugars
In: European Journal of Inorganic Chemistry (2024)
ISSN: 1434-1948
DOI: 10.1002/ejic.202400117 - , , :
Increasing 4H-SiC Trench Depth by Improving the Dry Etch Selectivity towards the Oxide Hard Mask
DOI: 10.4028/p-1PoMgV - , , , , , , , , , :
Quantum enhanced electric field mapping within semiconductor devices
In: Physical Review Applied (2024)
ISSN: 2331-7019
DOI: 10.1103/pv13-vgcw - , , , , , :
Transition from etch-back to growth conditions during ammonothermal growth of GaN – a transient numerical model for convective flow and temperature distribution in a retrograde solubility configuration
GaN Marathon (Verona, 9. Juni 2024 - 12. Juni 2024) - , , , :
Device Modeling of 4H-SiC PIN Photodiodes with Shallow Implanted Al Emitters for VUV Sensor Applications
In: Key Engineering Materials 984 (2024), S. 55-62
ISSN: 1013-9826
DOI: 10.4028/p-T0xLa9 - , , , , , :
Investigation of CMOS Single Process Steps on 4H-SiC a-Plane Wafers for Quantum Applications
47th ICT and Electronics Convention, MIPRO 2024 (Opatija, 20. Mai 2024 - 24. Mai 2024)
In: Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Dragan Cisic, Pavle Ergovic, Tihana Galinac Grbac, Vera Gradisnik, Stjepan Gros, Andrej Jokic, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Marko Svaco, Edvard Tijan, Neven Vrcek, Boris Vrdoljak (Hrsg.): 2024 47th ICT and Electronics Convention, MIPRO 2024 - Proceedings 2024
DOI: 10.1109/MIPRO60963.2024.10569589 - , , , , , , , , , , , , :
Pulse tunable SiGeSn/GeSn multi-quantum-well microdisk lasers
Metamaterials, Metadevices, and Metasystems 2024 (San Diego, CA, USA, 18. August 2024 - 22. August 2024)
In: Nader Engheta, Mikhail A. Noginov, Nikolay I. Zheludev, Nikolay I. Zheludev (Hrsg.): Proceedings of SPIE - The International Society for Optical Engineering 2024
DOI: 10.1117/12.3028016 - , , , , , , , , , , , , , , , , :
Continuous-wave electrically pumped multi-quantum-well laser based on group-IV semiconductors
In: Nature Communications 15 (2024), Art.Nr.: 10502
ISSN: 2041-1723
DOI: 10.1038/s41467-024-54873-z - , , :
Simplifying Random Particle Structures within Soft Magnetic Composite Materials for the Optimization of 3D-FEM Simulations
In: IEEE Transactions on Magnetics (2024), S. 1-1
ISSN: 0018-9464
DOI: 10.1109/TMAG.2024.3434611 - , , , , , , , :
Discovery of Molecular Intermediates and Nonclassical Nanoparticle Formation Mechanisms by Liquid Phase Electron Microscopy and Reaction Throughput Analysis
In: Small Structures (2024)
ISSN: 2688-4062
DOI: 10.1002/sstr.202400146 - , , , , , , :
Reduction of dark current in Ge-on-Si avalanche photodiodes using a double mesa structure
Metamaterials, Metadevices, and Metasystems 2024 (San Diego, CA, 18. August 2024 - 22. August 2024)
In: Nader Engheta, Mikhail A. Noginov, Nikolay I. Zheludev, Nikolay I. Zheludev (Hrsg.): Proceedings of SPIE - The International Society for Optical Engineering 2024
DOI: 10.1117/12.3028061 - , , , , :
Low-temperature performance of GeSn-on-Si avalanche photodiodes toward single-photon detection
In: Materials Science in Semiconductor Processing 176 (2024), Art.Nr.: 108303
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2024.108303 - , , :
Ge-on-Si single-photon avalanche diode using a double mesa structure
In: Optics Letters 49 (2024), S. 6345-6348
ISSN: 0146-9592
DOI: 10.1364/OL.534436 - , , , :
Bandwidth enhancement in GeSn-on-Si avalanche photodiodes with a 60 GHz gain-bandwidth-product
2024 IEEE Silicon Photonics Conference, SiPhotonics 2024 (Tokyo, JPN, 15. April 2024 - 18. April 2024)
In: IEEE International Conference on Group IV Photonics GFP 2024
DOI: 10.1109/SiPhotonics60897.2024.10543351 - , , , , , :
Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential
In: Materials (2024)
ISSN: 1996-1944
DOI: 10.3390/ma17133104 - , :
Nitride semiconductor crystal growth at FAU Erlangen-Nürnberg
12th annual meeting of the young crystal growers (Erlangen, 5. März 2024 - 5. März 2024) - , , , :
Adhesion strength of ductile thin film determined by cross-sectional nanoindentation
In: International Journal of Mechanical Sciences 270 (2024), Art.Nr.: 109103
ISSN: 0020-7403
DOI: 10.1016/j.ijmecsci.2024.109103
2023
- , , , , , :
Correlation of Extended Defects with Electrical Yield of SiC MOSFET Devices
In: Defect and Diffusion Forum 426 (2023), S. 11-16
ISSN: 1012-0386
DOI: 10.4028/p-i82158 - Guiot E., Allibert F., Leib J., Becker T., Erlbacher T.:
Improved Power Cycling Reliability through the use of SmartSiC ™ Engineered Substrate for Power Devices
2023 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2023
DOI: 10.30420/566091210 - Guiot E., Allibert F., Leib J., Becker T., Schwarzenbach W., Hellinger C., Erlbacher T., Rouchier S.:
Proven Power Cycling Reliability of Ohmic Annealing Free SiC Power Device Through the Use of SmartSiC™ Substrate
Trans Tech Publications Ltd, 2023
DOI: 10.4028/p-777hqg - Schlichting H., Lim M., Becker T., Kallinger B., Erlbacher T.:
The Influence of Extended Defects in 4H-SiC Epitaxial Layers on Gate Oxide Performance and Reliability
Trans Tech Publications Ltd, 2023
DOI: 10.4028/p-4i3rhf - , , , , , , :
Sharp MIR plasmonic modes in gratings made of heavily doped pulsed laser-melted Ge1-xSnx
In: Optical Materials Express 13 (2023), S. 752-763
ISSN: 2159-3930
DOI: 10.1364/OME.479637 - , , , , , :
Goethite Mineral Dissolution to Probe the Chemistry of Radiolytic Water in Liquid-Phase Transmission Electron Microscopy
In: Advanced Science 10 (2023), Art.Nr.: 2301904
ISSN: 2198-3844
DOI: 10.1002/advs.202301904 - , , , , , , , , :
Tailoring the Acidity of Liquid Media with Ionizing Radiation: Rethinking the Acid-Base Correlation beyond pH
In: Journal of Physical Chemistry Letters (2023), S. 4644-4651
ISSN: 1948-7185
DOI: 10.1021/acs.jpclett.3c00593 - , , , , , , , , , , , , , :
Operational experience with a liquid organic hydrogen carrier (LOHC) system for bidirectional storage of electrical energy over 725 h
In: Journal of Energy Storage 72 (2023), Art.Nr.: 108478
ISSN: 2352-152X
DOI: 10.1016/j.est.2023.108478 - , , , , :
Author Correction: Highly accurate determination of heterogeneously stacked Van-der-Waals materials by optical microspectroscopy (Scientific Reports, (2020), 10, 1, (13676), 10.1038/s41598-020-70580-3)
In: Scientific Reports 13 (2023), Art.Nr.: 1410
ISSN: 2045-2322
DOI: 10.1038/s41598-023-28605-0 - , , , , , , , , , , , , , , , , , :
Unconventional conductivity increase in multilayer black phosphorus
In: npj 2D Materials and Applications 7 (2023), Art.Nr.: 21
ISSN: 2397-7132
DOI: 10.1038/s41699-023-00384-2 - , , , :
Stiffness influence on particle separation in polydimethylsiloxane-based deterministic lateral displacement devices
In: Microfluidics and Nanofluidics 27 (2023), Art.Nr.: 76
ISSN: 1613-4982
DOI: 10.1007/s10404-023-02685-w - :
Systemübergreifende modulare Charakterisierung von Dünnschichtsystemen mittels Reflexionsmessungen (Masterarbeit, 2023) - :
Junior Research Group on Nitride Semiconductors
Seminar of the Young Crystal Growers (DGKK) (, 14. März 2023) - , , , , , :
Temperature Field, Flow Field, and Temporal Fluctuations Thereof in Ammonothermal Growth of Bulk GaN—Transition from Dissolution Stage to Growth Stage Conditions
In: Materials 16 (2023), S. 2016
ISSN: 1996-1944
DOI: 10.3390/ma16052016 - , , , , :
The Influence of Extended Defects in 4H-SiC Epitaxial Layers on Gate Oxide Performance and Reliability
In: Materials Science Forum 1090 (2023), S. 127-133
ISSN: 0255-5476
DOI: 10.4028/p-4i3rhf - :
Einzelprozessentwicklung für die Herstellung von Halbleiterbauelementen auf 4H-SiC a-Plane Substraten (Masterarbeit, 2023) - , , , , :
4H-SiC PIN Photodiode for VUV Detection Using an Enhanced Emitter Doping Design
2023 IEEE Photonics Conference, IPC 2023 (Orlando, FL, USA, 12. November 2023 - 16. November 2023)
In: 2023 IEEE Photonics Conference, IPC 2023 - Proceedings 2023
DOI: 10.1109/IPC57732.2023.10360797 - , , , , :
Towards SiC-Based VUV Pin-Photodiodes - Investigations on 4H-SiC Photodiodes with Shallow Implanted Al Emitters
DOI: 10.4028/p-959z1t - , , , , , , , , , :
Correlating Optical Microspectroscopy with 4×4 Transfer Matrix Modeling for Characterizing Birefringent Van der Waals Materials
In: Small Methods (2023)
ISSN: 2366-9608
DOI: 10.1002/smtd.202300618 - , , , , , , , , :
SiGeSn/GeSn Multi Quantum Wells Light Emitting Diodes with a Negative Differential Resistance
2023 IEEE Silicon Photonics Conference, SiPhotonics 2023 (Washington, DC, 4. April 2023 - 7. April 2023)
In: IEEE International Conference on Group IV Photonics GFP 2023
DOI: 10.1109/SiPhotonics55903.2023.10141960 - , , , , , , , , , , , :
Effect of the Precursor Chemistry on the Crystallization of Triple Cation Mixed Halide Perovskites
In: Chemistry of Materials (2023)
ISSN: 0897-4756
DOI: 10.1021/acs.chemmater.3c00799 - , , , , , , , , , :
Ferroelectric Content-Addressable Memory Cells with IGZO Channel: Impact of Retention Degradation on the Multibit Operation
In: ACS Applied Electronic Materials 5 (2023), S. 812-820
ISSN: 2637-6113
DOI: 10.1021/acsaelm.2c01357 - , , , , , :
Gram-Scale Continuous Flow Synthesis of Silver-on-Silica Patchy Nanoparticles with Widely Tunable Resonances for Plasmonics Applications
In: ACS Applied Nano Materials 6 (2023), S. 10126-10137
ISSN: 2574-0970
DOI: 10.1021/acsanm.3c00869 - Kim S., Byun D.W., Shin H.K., Koo S.M., Erlbacher T., Lim M., Csato C., Förthner J., Rusch O., Ehrensberger K., Kupfer B., Beuer S., Oertel S.:
A Modeling of 4H-SiC Super-Junction MOSFETs with Filtered High Energy Implantation
Trans Tech Publications Ltd, 2023
DOI: 10.4028/p-hyy2l9 - , , , , , , , :
High mobility Ge 2DHG based MODFETs for low-temperature applications
In: Semiconductor Science and Technology 38 (2023), Art.Nr.: 035007
ISSN: 0268-1242
DOI: 10.1088/1361-6641/acb22f
2022
- , , , , , :
Defect reduction in SiC epilayers by different substrate cleaning methods
In: Materials Science in Semiconductor Processing 140 (2022)
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2021.106414 - Erlbacher T., Rouchier S., Guiot E., Picun G., Allibert F., Leib J., Becker T., Schwarzenbach W., Drouin A., Béthoux J.M., Widiez J.:
Proven Power Cycling Reliability of SmartSiC™ Substrate for Power Devices
International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2022
DOI: 10.30420/565822081 - , , , , , , :
Optimization of Fully Integrated Al Nanohole Array-Based Refractive Index Sensors for Use With a LED Light Source
In: IEEE Photonics Journal 14 (2022)
ISSN: 1943-0655
DOI: 10.1109/JPHOT.2022.3177354 - , , , , , :
Short Circuit Performance and Current Limiting Mode of a Monolithically Integrated SiC Circuit Breaker for DC Applications up to 800 v
24th European Conference on Power Electronics and Applications, EPE 2022 ECCE Europe (Hannover, 5. September 2022 - 9. September 2022)
In: 24th European Conference on Power Electronics and Applications, EPE 2022 ECCE Europe 2022 - , , :
One-dimensionality of the minimizers for a diffuse interface generalized antiferromagnetic model in general dimension
In: Journal of Functional Analysis 283 (2022), Art.Nr.: 109715
ISSN: 0022-1236
DOI: 10.1016/j.jfa.2022.109715 - , , , , :
Ultrathin and flexible sensors for pressure and temperature monitoring inside battery cells
2022 IEEE Sensors Conference, SENSORS 2022 (Dallas, TX, 30. Oktober 2022 - 2. November 2022)
In: Proceedings of IEEE Sensors 2022
DOI: 10.1109/SENSORS52175.2022.9967234 - , , , , , , , , :
Optical Microscopy Systems for the Detection of Unlabeled Nanoparticles
In: International Journal of Nanomedicine Volume 17 (2022), S. 2139-2163
ISSN: 1176-9114
DOI: 10.2147/IJN.S355007 - , , , , , , , , , , :
Sub-Kelvin thermometry for evaluating the local temperature stability within in situ TEM gas cells
In: Ultramicroscopy 235 (2022), S. 113494
ISSN: 0304-3991
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Radiolysis‐Driven Evolution of Gold Nanostructures – Model Verification by Scale Bridging In Situ Liquid‐Phase Transmission Electron Microscopy and X‐Ray Diffraction
In: Advanced Science 9 (2022), Art.Nr.: 2202803
ISSN: 2198-3844
DOI: 10.1002/advs.202202803
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Optimierung von Lithographieprozessen auf Germaniumoberflächen zur Herstellung von Nanodrähten (Bachelorarbeit, 2022) - , , , :
Increasing flow rates in polydimethylsiloxane-based deterministic lateral displacement devices for sub-micrometer particle separation
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Modeling and design of an electrically pumped SiGeSn microring laser
Silicon Photonics XVII 2022 (Online, 20. Februar 2022 - 24. Februar 2022)
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Electrically pumped SiGeSn microring lasers
2022 IEEE Photonics Society Summer Topicals Meeting Series, SUM 2022 (Cabo San Lucas, MEX, 11. Juli 2022 - 13. Juli 2022)
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Via Size-Dependent Properties of TiAl Ohmic Contacts on 4H-SiC
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Defect detection in nano-imprint stamps with deep learning and low resolution microscope (Masterarbeit, 2022) - , , , , , , :
High Energy Computed Tomography as a Tool for Validation of Numerical Simulations of Ammonothermal Crystal Growth of GaN
8th International Workshop on Crystal Growth Technology (Berlin, 29. Mai 2022 - 2. Juni 2022) - , , , , , , , , , , , , :
In Situ Monitoring Technologies as Prospective Validation Tools for Numerical Simulations of Ammonothermal Crystal Growth
7th European Conference on Crystal Growth (Paris, 25. Juli 2022 - 27. Juli 2022) - , , , , , , , :
High-Energy Computed Tomography as a Prospective Tool for In Situ Monitoring of Mass Transfer Processes inside High-Pressure Reactors-A Case Study on Ammonothermal Bulk Crystal Growth of Nitrides including GaN
In: Materials 15 (2022), S. 6165
ISSN: 1996-1944
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Artificial Intelligence for Crystal Growth and Characterization
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ISSN: 2073-4352
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Temperature field and fluid flow in ammonothermal growth of GaN during etch-back and crystal growth for a retrograde solubility configuration
International Workshop on Nitride Semiconductors (Berlin, 9. Oktober 2022 - 14. Oktober 2022) - :
Modeling of thick photoresist for grayscale lithography application (Masterarbeit, 2022) - , , , , , , :
Electroluminescence of SixGe1-x-ySny / Ge1-ySny pin-Diodes Grown on a GeSn Buffer
48th IEEE European Solid State Circuits Conference, ESSCIRC 2022 (Milan, ITA, 19. September 2022 - 22. September 2022)
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Optimierung und Charakterisierung von 2D-Materialien für die Passivierung von schwarzem Phosphor (Masterarbeit, 2022) - , , , , , :
GeSn-on-Si Avalanche Photodiodes for Short-Wave Infrared Detection
48th IEEE European Solid State Circuits Conference, ESSCIRC 2022 (Milan, ITA, 19. September 2022 - 22. September 2022)
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2021
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Accurate prediction of EUV lithographic images and 3D mask effects using generative networks
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ISSN: 1932-5150
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Reliability of Silicon-Nitride based High-Voltage Monolithic Capacitors
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ISSN: 2516-0230
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Beam-induced heating at low electron fluxes during liquid phase transmission electron microscopy
In: Microscopy and Microanalysis 27 (2021), S. 1040-1042
ISSN: 1431-9276
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Evaluating local temperature changes during liquid cell transmission electron microscopy by in situ parallel beam electron diffraction
Virtual Early Career European Microscopy Congress 2020 (Kopenhagen, 24. November 2020 - 26. November 2020)
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Combined dynamic operation of PEM fuel cell and continuous dehydrogenation of perhydro-dibenzyltoluene
In: International Journal of Hydrogen Energy 46 (2021), S. 35662-35677
ISSN: 0360-3199
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From Cyclopentasilane to Thin-Film Transistors
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ISSN: 2199-160X
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Factors influencing the gas bubble evolution and the cristobalite formation in quartz glass Cz crucibles for Czochralski growth of silicon crystals
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ISSN: 0022-0248
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Direct Manipulation of Nanostructures Utilizing Donut-Shaped Potential Wells during Liquid-Phase Transmission Electron Microscopy
Virtual Early Career European Microscopy Congress 2020
DOI: 10.22443/rms.emc2020.158 - , , , :
A Review of Platinum Diffusion in Silicon and Its Application for Lifetime Engineering in Power Devices
In: physica status solidi (a) (2021)
ISSN: 1862-6300
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A Fully Integrated Ferroelectric Thin-Film-Transistor – Influence of Device Scaling on Threshold Voltage Compensation in Displays
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ISSN: 2199-160X
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The long journey from crystal growth to power devices, the role of materials development for III-Nitride semiconductors
2021 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2021 (Virtual, Online, 3. Mai 2021 - 7. Mai 2021)
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Narrow inhomogeneous distribution of spin-active emitters in silicon carbide
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X-Ray diffraction analysis and modeling of the depth profile of lattice strains in AlGaN stacks
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Removing the orientational degeneracy of the TS defect in 4H-SiC by electric fields and strain
In: New Journal of Physics 23 (2021), Art.Nr.: 073002
ISSN: 1367-2630
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Numerical simulation of ammonothermal crystal growth of GaN-current state, challenges, and prospects
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Boundary conditions for simulations of fluid flow and temperature field during ammonothermal crystal growth—a machine-learning assisted study of autoclave wall temperature distribution
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Numerical Simulations of Ammonothermal Crystal Growth of GaN and Pathways towards their Experimental Validation
Seminar of the Young Crystal Growers (DGKK) (Berlin, 5. Oktober 2022 - 6. Oktober 2021) - :
Impact of Extended Defects on the Yield and Performance of 4H-SiC Power Devices
5th Sino MOS-AK Workshop (Xi'an, 11. August 2021 - 13. August 2021)
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Hybrid Additive Manufacturing by Embedded Electrical Circuits Using 3-D Dispensing
In: IEEE Transactions on Components, Packaging and Manufacturing Technology 11 (2021), S. 510-521
ISSN: 2156-3950
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Ammonothermal Materials
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Modelling the Radiolysis of Silver Nitrate Solutions in presence of Bromide Ions in Liquid-Phase Transmission Electron Microscopy
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Temperature analysis of the Gaussian distribution modeling the barrier height inhomogeneity in the Tungsten/4H-SiC Schottky diode
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Automated quantitative analysis of void morphology evolution in Ag[sbnd]Ag direct bonding interface after accelerated aging
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Cu-Cu Thermocompression Bonding with Cu-Nanowire Films for Power Semiconductor Die-Attach on DBC Substrates
23rd IEEE Electronics Packaging Technology Conference, EPTC 2021 (Virtual, Online, SGP, 1. Dezember 2021 - 30. Dezember 2021)
In: 2021 IEEE 23rd Electronics Packaging Technology Conference, EPTC 2021 2021
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An Iterative Surface Potential Algorithm Including Interface Traps for Compact Modeling of SiC-MOSFETs
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Impact of channel implantation on a 4h-sic cmos operational amplifier for high temperature applications
18th International Conference on Silicon Carbide and Related Materials, ICSCRM 2019 (Kyoto, 29. September 2019 - 4. Oktober 2019)
In: Hiroshi Yano, Takeshi Ohshima, Kazuma Eto, Takeshi Mitani, Shinsuke Harada, Yasunori Tanaka (Hrsg.): Materials Science Forum 2020
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Molecular dynamics modeling of the radial heat transfer from silicon nanowires
2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020 (, 3. September 2020 - 6. Oktober 2020)
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The impact of dislocations on AlGaN/GaN Schottky diodes and on gate failure of high electron mobility transistors
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Vertical breakdown of GaN on Si due to V-pits
In: Journal of Applied Physics 127 (2020), Art.Nr.: 015701
ISSN: 0021-8979
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Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures
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ISSN: 2158-3226
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Design Considerations on a Monolithically Integrated, Self Controlled and Regenerative 900 V SiC Circuit Breaker
2020 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia, WiPDA Asia 2020 (Suita, 23. September 2020 - 25. September 2020)
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A 4H-SiC UV Phototransistor with Excellent Optical Gain Based on Controlled Potential Barrier
In: IEEE Transactions on Electron Devices 67 (2020), S. 154-159
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In-situ preparation of gan sacrificial layers on sapphire substrate in movpe reactor for self-separation of the overgrown gan crystal
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ISSN: 2073-4352
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Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC
In: Hiroshi Yano, Takeshi Ohshima, Kazuma Eto, Takeshi Mitani, Shinsuke Harada, Yasunori Tanaka (Hrsg.): Materials Science Forum 2020
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Advancing the sensitivity of integrated epoxy-based Bragg grating refractometry by high-index nanolayers
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Highly Accurate Determination of Heterogeneously Stacked Van-der-Waals Materials by Optical Microspectroscopy
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ASNOM mapping of SiC epilayer doping profile and of surface phonon polariton waveguiding
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ISSN: 0021-8979
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Influence of shallow pits and device design of 4H-SiC VDMOS transistors on in-line defect analysis by photoluminescence and differential interference contrast mapping
18th International Conference on Silicon Carbide and Related Materials, ICSCRM 2019 (Kyoto, 29. September 2019 - 4. Oktober 2019)
In: Hiroshi Yano, Takeshi Ohshima, Kazuma Eto, Takeshi Mitani, Shinsuke Harada, Yasunori Tanaka (Hrsg.): Materials Science Forum 2020
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Spin-controlled generation of indistinguishable and distinguishable photons from silicon vacancy centres in silicon carbide
In: Nature Communications 11 (2020), Art.Nr.: 2516
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Mode properties of telecom wavelength InP-based high-(Q/V) L4/3 photonic crystal cavities
In: Nanotechnology 31 (2020), Art.Nr.: 315703
ISSN: 1361-6528
DOI: 10.1088/1361-6528/ab8a8c
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Reducing on-resistance for SiC diodes by thin wafer and laser anneal technology
18th International Conference on Silicon Carbide and Related Materials, ICSCRM 2019 (Kyoto, 29. September 2019 - 4. Oktober 2019)
In: Hiroshi Yano, Takeshi Ohshima, Kazuma Eto, Takeshi Mitani, Shinsuke Harada, Yasunori Tanaka (Hrsg.): Materials Science Forum 2020
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Effect of temperature on the Fowler-Nordheim barrier height, flat band potentials and electron/hole effective masses in the MOS capacitors
In: Physica B-Condensed Matter 585 (2020), Art.Nr.: 412125
ISSN: 0921-4526
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Fully convolutional networks for void segmentation in X-ray images of solder joints
In: Journal of Manufacturing Processes 57 (2020), S. 762-767
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RESURF n-LDMOS Transistor for Advanced Integrated Circuits in 4H-SiC
In: IEEE Transactions on Electron Devices 67 (2020), S. 3278-3284
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X-ray characterization of physical-vapor-transport-grown bulk AlN single crystals
In: Journal of Applied Crystallography 53 (2020), S. 1080-1086
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Reliability of silver direct bonding in thermal cycling tests
8th IEEE Electronics System-Integration Technology Conference, ESTC 2020 (Tonsberg, Vestfold, 15. September 2020 - 18. September 2020)
In: Proceedings - 2020 IEEE 8th Electronics System-Integration Technology Conference, ESTC 2020 2020
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A Method for the Characterization of Adhesion Strength Degradation of Thin Films on Si-Substrate under thermal cycling test
2020 CIPS (Berlin, 24. März 2020 - 26. März 2020) - , , , , :
Combined experimental and numerical approach for investigating the mechanical degradation of the interface between thin film metallization and Si-substrate after temperature cycling test
In: Microelectronics Reliability (2020)
ISSN: 0026-2714
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Strain-activated light-induced halide segregation in mixed-halide perovskite solids
In: Nature Communications 11 (2020), Art.Nr.: 6328
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Integration of printed electronics with potted power electronic modules
11th International Conference on Integrated Power Electronics Systems, CIPS 2020 (Berlin, 24. März 2020 - 26. März 2020)
In: CIPS 2020 - 11th International Conference on Integrated Power Electronics Systems 2020
2019
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Improving 5V digital 4H-SIC CMOS ics for operating at 400°C using PMOS channel implantation
In: Materials Science Forum (2019), S. 827-831
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Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
In: physica status solidi (a) 216 (2019), Art.Nr.: 1900306
ISSN: 1862-6300
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Silicon RC-Snubber for 900 V Applications Utilising non-Stoichiometric Silicon Nitride
31st IEEE International Symposium on Power Semiconductor Devices and ICs (ISPSD) (Shanghai, 19. Mai 2019 - 23. Mai 2019)
In: 31st International Symposium on Power Semiconductor Devices & ICs, NEW YORK: 2019
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Laser Writing of Scalable Single Color Centers in Silicon Carbide
In: Nano Letters 19 (2019), S. 2377-2383
ISSN: 1530-6984
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Performance of 4H-SIC bipolar diodes as temperature sensor at low temperatures
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
DOI: 10.4028/www.scientific.net/MSF.963.572 - , , , , , :
Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
In: Journal of Micro-Nanolithography MEMS and MOEMS 18 (2019), Art.Nr.: 011005
ISSN: 1932-5150
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Deeper insight into lifetime-engineering in 4H-SiC by ion implantation
In: Journal of Applied Physics 126 (2019), Art.Nr.: 045701
ISSN: 0021-8979
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Experimental investigation of the gravity influence on the condensation behaviour on Al and PTFE-samples
27. GALA-Fachtagung "Experimentelle Strömungsmechanik" (Erlangen, 3. September 2019 - 5. September 2019)
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Towards highly integrated, automotive power SoCs using capacitors operating at 100 V implemented in TSV
9th International Conference on Integrated Power Electronics Systems, CIPS 2016 (Nuremberg, DEU, 8. März 2016 - 10. März 2016)
In: CIPS 2016 - 9th International Conference on Integrated Power Electronics Systems 2019 - , , , , , , :
Nanoparticles: In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid–Liquid–Gas Interface
In: Advanced Materials Interfaces 6 (2019), S. 1970126
ISSN: 2196-7350
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In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid-Liquid-Gas Interface
In: Advanced Materials Interfaces 6 (2019), Art.Nr.: 1901027
ISSN: 2196-7350
DOI: 10.1002/admi.201901027
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Preparation of Graphene-Supported Microwell Liquid Cells for In Situ Transmission Electron Microscopy
In: Journal of Visualized Experiments (2019), Art.Nr.: e59751
ISSN: 1940-087X
DOI: 10.3791/59751
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Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
In: Journal of Physical Chemistry C 123 (2019), S. 9192 - 9201
ISSN: 1932-7447
DOI: 10.1021/acs.jpcc.9b00957
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Determination of compensation ratios of al-implanted 4H-SIC by tcad modelling of TLM measurements
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
DOI: 10.4028/www.scientific.net/MSF.963.445 - , , , , , :
Retrofitting Wide Band Gap Devices to classic Power Modules using Silicon RC Snubbers
2019 PCIM Europe (Nürnberg, 7. Mai 2019 - 9. Mai 2019)
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Wavelength-selective 4H-SiC UV-sensor array
In: Materials Science in Semiconductor Processing 90 (2019), S. 205-211
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Feasibility of 4H-SiC p-i-n Diode for Sensitive Temperature Measurements Between 20.5 K and 802 K
In: IEEE Sensors Journal 19 (2019), S. 2871-2878
ISSN: 1530-437X
DOI: 10.1109/JSEN.2019.2891293 - , , , , :
Channeling in 4H-SiC from an application point of view
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
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On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
In: physica status solidi (a) 216 (2019), Art.Nr.: 1900167
ISSN: 1862-6300
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Influence of trench design on the electrical properties of 650v 4H-SIC JBS diodes
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
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Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors
In: Materials Science Forum 963 (2019), S. 763-767
ISSN: 0255-5476
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Design considerations for robust manufacturing and high yield of 1.2 kv 4H-SIC VDMOS transistors
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
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A hybrid frequency-time-domain approach to determine the vibration fatigue life of electronic devices
In: Microelectronics Reliability 98 (2019), S. 86-94
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2019.04.001 - , , , , :
Parameter study on the electrical contact resistance of axially canted coil springs for high-current systems
2018 29th International Conference on Electrical Contacts together with 64th IEEE Holm Conference on Electrical Contacts (Albuquerque, NM, 14. Oktober 2018 - 18. Oktober 2018)
DOI: 10.1109/HOLM.2018.8611640 - , , , :
Investigation of magnetic properties from a manganese-zinc-ferrite polymer bonded material
In: International Journal of Applied Electromagnetics and Mechanics 59 (2019), S. 97-104
ISSN: 1383-5416
DOI: 10.3233/JAE-171244 - , , , :
Comprehensive accuracy examination of electrical power loss measurements of inductive components for frequencies up to 1 MHz
In: Journal of Magnetism and Magnetic Materials 497 (2019), Art.Nr.: 166022
ISSN: 0304-8853
DOI: 10.1016/j.jmmm.2019.166022 - , , , , , :
Spectrally Stable Defect Qubits with no Inversion Symmetry for Robust Spin-To-Photon Interface
In: Physical Review Applied 11 (2019), Art.Nr.: 044022
ISSN: 2331-7019
DOI: 10.1103/PhysRevApplied.11.044022 - , , , , :
Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
In: AIP Advances 9 (2019), S. 055308
ISSN: 2158-3226
DOI: 10.1063/1.5096440 - , , , , :
Publisher's Note: Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC (AIP Advances (2019) 9 (055308) DOI: 10.1063/1.5096440)
In: AIP Advances 9 (2019), Art.Nr.: 079901
ISSN: 2158-3226
DOI: 10.1063/1.5118666 - , , , , , , , :
On the origin of charge compensation in aluminum-implanted n-type 4H-SiC by analysis of hall effect measurements
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
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Design of a 4H-SIC resurf N-LDMOS transistor for high voltage integrated circuits
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
DOI: 10.4028/www.scientific.net/MSF.963.629 - , , , , , , , :
Comparison between NI-SALICIDE and self-aligned lift-off used in fabrication of ohmic contacts for sic power MOSFET
12th European Conference on Silicon Carbide and Related Materials, ECSCRM 2018 (Birmingham, 2. September 2018 - 6. September 2018)
In: Peter M. Gammon, Vishal A. Shah, Richard A. McMahon, Michael R. Jennings, Oliver Vavasour, Philip A. Mawby, Faye Padfield (Hrsg.): Materials Science Forum 2019
DOI: 10.4028/www.scientific.net/MSF.963.490
2018
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Novel Approach Based on Continuous Trench Modelling to Predict Focused Ion Beam Prepared Freeform Surfaces
In: Journal of Materials Processing Technology (2018)
ISSN: 0924-0136
DOI: 10.1016/j.jmatprotec.2017.10.024 - , , , :
Design and characterization of a compact and robust shielded dielectric waveguide for mmW applications
In: Proceedings of the GeMiC 2018 - The 11th German Microwave Conference (GeMiC 2018) 2018
DOI: 10.23919/gemic.2018.8335108 - , , , , , , , , , , , :
Electrical properties of schottky-diodes based on B doped diamond
International Conference on Silicon Carbide and Related Materials, ICSCRM 2017
DOI: 10.4028/www.scientific.net/MSF.924.931 - , , , , , , , :
Influence and mutual interaction of process parameters on the Z1/2defect concentration during epitaxy of 4H-SiC
International Conference on Silicon Carbide and Related Materials, ICSCRM 2017
DOI: 10.4028/www.scientific.net/MSF.924.112 - , , , , , , :
One-step nanoimprinted Bragg grating sensor based on hybrid polymers
In: Sensors and Actuators A-Physical 283 (2018), S. 298-304
ISSN: 0924-4247
DOI: 10.1016/j.sna.2018.09.053 - , , , , , :
Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Optical Sensing and Detection V 2018
DOI: 10.1117/12.2303820 - , , , , , :
Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
International Conference on Silicon Carbide and Related Materials, ICSCRM 2017
DOI: 10.4028/www.scientific.net/MSF.924.901 - :
Development of advanced liquid cell architectures for high performance in situ transmission electron microscopy in materials sciences (Dissertation, 2018)
URL: https://opus4.kobv.de/opus4-fau/frontdoor/index/index/docId/10092 - , , , , :
Large-Area Layer Counting of 2D Materials via Visible Reflection Spectroscopy
19th International Microscopy Congress (IMC19) (Sydney, 9. September 2018 - 14. September 2018)
URL: https://abstracts.imc19.com/pdf/abstract_497.pdf - , , , , , , :
Unravelling the Mechanisms of Gold−Silver Core−Shell Nanostructure Formation by in Situ TEM Using an Advanced Liquid Cell Design
In: Nano Letters 18 (2018), S. 7222 - 7229
ISSN: 1530-6984
DOI: 10.1021/acs.nanolett.8b03388
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Atomic layer deposition of phosphorus oxide films as solid sources for doping of semiconductor structures
18th IEEE International Conference on Nanotechnology (IEEE-NANO) (Cork, 23. Juli 2018 - 26. Juli 2018)
In: 2018 IEEE 18TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), NEW YORK: 2018
DOI: 10.1109/nano.2018.8626235 - , , , , , , , , , , :
Evaluation and Characterization of 3D Printed Pyramid Horn Antennas utilizing different Deposition Techniques for Conductive Material
In: IEEE Transactions on Components, Packaging and Manufacturing Technology (2018), S. 1-1
ISSN: 2156-3950
DOI: 10.1109/tcpmt.2018.2871931 - , , , , :
Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
In: Solid-State Electronics (2018), S. 101-105
ISSN: 0038-1101
DOI: 10.1016/j.sse.2018.03.010 - , , , , , , , , , , , , , , :
Quantum Properties of Dichroic Silicon Vacancies in Silicon Carbide
In: Physical Review Applied 9 (2018), Art.Nr.: 034022
ISSN: 2331-7019
DOI: 10.1103/PhysRevApplied.9.034022 - , , , , , , :
Normalized differential conductance to study current conduction mechanisms in MOS structures
In: Microelectronics Reliability 91 (2018), S. 183-187
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2018.10.001 - , , , , , , , :
TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
In: Journal of Optics 20 (2018), Art.Nr.: 01LT02
ISSN: 2040-8978
DOI: 10.1088/2040-8986/aa9bcf - , , , , , , :
Nano- and micro-patterned S-, H-, and X-PDMS for cell-based applications: Comparison of wettability, roughness, and cell-derived parameters
In: Frontiers in Bioengineering and Biotechnology 6 (2018), Art.Nr.: 51
ISSN: 2296-4185
DOI: 10.3389/fbioe.2018.00051 - , , , , :
3D-Printed Reusable Cell Culture Chamber with Integrated Electrodes for Electrical Stimulation and Parallel Microscopic Evaluation
In: 3D Printing and Additive Manufacturing 5 (2018), S. 115-125
ISSN: 2329-7662
DOI: 10.1089/3dp.2017.0103 - , :
Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale
19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (Toulouse, 15. April 2018 - 18. April 2018)
DOI: 10.1109/EuroSimE.2018.8369868
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Vibrational resistance investigation of an IGBT gate driver utilizing Frequency Response Analysis (FRA) and Highly Accelerated Life Test (HALT)
2018 10th International Conference on Integrated Power Electronics Systems (CIPS) (Stuttgart, 20. März 2018 - 22. März 2018)
URL: https://ieeexplore.ieee.org/document/8403138 - , , , , , :
Circuits with Scaled Metal Oxide Technology for Future TOLAE RF Systems
European Microwave Conference (Madrid, 23. September 2018 - 28. September 2018)
In: Proceedings of the 48th European Microwave Conference 2018 - , , , :
Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
In: Applied Energy 232 (2018), S. 572-582
ISSN: 0306-2619
DOI: 10.1016/j.apenergy.2018.10.004 - , , , :
Investigation of magnetic properties from a manganese–zinc–ferrite polymer bonded material
In: International Journal of Applied Electromagnetics and Mechanics Pre-press (2018), S. 1-8
ISSN: 1383-5416
DOI: 10.3233/JAE-171244 - , , , , :
An acoustic emmission sensor system for thin layer crack detection
29th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (Aalborg, 1. Oktober 2018 - 5. Oktober 2018)
DOI: 10.1016/j.microrel.2018.07.015 - , , , , , , , , :
Analysis of Compensation Effects in Aluminum-Implanted 4H-SiC Devices
In: Materials Science Forum 924 (2018), S. 184-187
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.924.184 - , , , , , , , , :
Heterogeneous Integration of Vertical GaN Power Transistor on Si Capacitor for DC-DC Converters
7th Electronic System-Integration Technology Conference, ESTC 2018
DOI: 10.1109/ESTC.2018.8546362 - , , , , , :
Human Sweat Analysis Using a Portable Device Based on a Screen-printed Electrolyte Sensor
In: Electroanalysis 30 (2018), S. 665-671
ISSN: 1040-0397
DOI: 10.1002/elan.201700672
2017
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Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
In: Materials Science Forum 897 (2017), S. 665-668
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.897.665 - , , , , , , :
Stress reduction in high voltage MIS capacitor fabrication
19th International Symposium on Power Electronics, Ee 2017
DOI: 10.1109/PEE.2017.8171664 - , , , , , , , :
Polymerization related deformations in multilayer soft stamps for nanoimprint
In: Journal of Applied Physics 122 (2017), Art.Nr.: 165305
ISSN: 0021-8979
DOI: 10.1063/1.5001463 - , , , , :
Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Integrated Optics: Devices, Materials, and Technologies XXI 2017
DOI: 10.1117/12.2249665 - , , , , , :
Waveguide Bragg Gratings in Ormocer®s for Temperature Sensing
In: Sensors 17 (2017), Art.Nr.: 2459
ISSN: 1424-8220
DOI: 10.3390/s17112459 - , , , , , :
Controlled silver-shell growth on gold nanorods studied by in situ liquid cell TEM techniques
Microscopy Conference 2017 (Lausanne, 21. August 2017 - 25. August 2017)
In: Microscopy Conference 2017 (MC 2017) - Proceedings 2017
URL: https://epub.uni-regensburg.de/36099/ - , , , :
Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
In: Applied Physics Letters 110 (2017), Art.Nr.: 021909
ISSN: 0003-6951
DOI: 10.1063/1.4973968 - , , , , :
Ion Implantation of Polypropylene Films for the Manufacture of Thin Film Capacitors
21st International Conference on Ion Implantation Technology, IIT 2016
DOI: 10.1109/IIT.2016.7882887 - , , , :
Monolithically integrated solid-state-circuit-breaker for high power applications
11th European Conference on Silicon Carbide and Related Materials, ECSCRM 2016
DOI: 10.4028/www.scientific.net/MSF.897.661 - , , :
Optimization of 4H-SiC photodiodes as selective UV sensors
In: Materials Science Forum (2017), S. 622-625
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.897.622 - , , , , :
Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 °C
In: IEEE Transactions on Electron Devices 64 (2017), S. 3399-3404
ISSN: 0018-9383
DOI: 10.1109/TED.2017.2711271 - , , , , :
Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
In: Materials Science Forum (2017), S. 618-621
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.897.618 - , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , :
Program FFlexCom - High frequency flexible bendable electronics for wireless communication systems
In: 2017 IEEE International Conference on Microwaves, Antennas, Communications and Electronic Systems (COMCAS) 2017
DOI: 10.1109/COMCAS.2017.8244733 - , , , , :
Temperature Referenced Planar Bragg Grating Strain Sensor in fs-Laser Cut COC Specimen
In: IEEE Photonics Technology Letters (2017)
ISSN: 1041-1135
DOI: 10.1109/LPT.2017.2693401 - , , , , , , , :
Solubility and dissolution kinetics of GaN in supercritical ammonia in presence of ammonoacidic and ammonobasic mineralizers
In: Journal of Crystal Growth 479 (2017), S. 59-66
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2017.09.027 - , , , , , , , :
Chemical stability of carbon-based inorganic construction materials for in situ x-ray measurements of ammonothermal crystal growth of nitrides
5th German-Swiss Conference on Crystal Growth (Freiburg, 8. März 2017 - 10. März 2017) - , , , , , , , , :
Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
In: Microelectronic Engineering 176 (2017), S. 22-27
ISSN: 0167-9317
DOI: 10.1016/j.mee.2017.01.009
2016
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Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
In: Materials Science Forum 858 (2016), S. 821-824
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.858.821 - , , , , :
Post-Trench Processing of Silicon Deep Trench Capacitors for Power Electronic Applications
DOI: 10.1109/ISPSD.2016.7520862 - , , :
Optimization of 4H-SiC UV Photodiode Performance Using Numerical Process and Device Simulation
In: IEEE Sensors Journal 16 (2016), S. 4246-4252
ISSN: 1530-437X
DOI: 10.1109/JSEN.2016.2539598 - , , , , :
Inductive power transfer system with a rotary transformer for contactless energy transfer on rotating applications
2016 IEEE International Symposium on Circuits and Systems, ISCAS 2016
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Slew rate control of a 600 V 55 mΩ GaN cascode
4th IEEE Workshop on Wide Bandgap Power Devices and Applications, WiPDA 2016 (Fayetteville, AR, 7. November 2016 - 9. November 2016)
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Waveguide Bragg gratings in Ormocer hybrid polymers
In: Optics Express 24 (2016), S. 14725-14736
ISSN: 1094-4087
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Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
In: Applied Physics A-Materials Science & Processing 122 (2016)
ISSN: 0947-8396
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Monolithic 3D TSV-based high-voltage, high-temperature capacitors
In: Microelectronic Engineering 156 (2016), S. 19-23
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Fundamental Efficiency Limits in Power Electronic Systems
2015 IEEE International Telecommunications Energy Conference, INTELEC 2015
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Graphene-Supported Microwell Liquid Cell for In Situ Electron Microscopy in Materials Science
In: Microscopy and Microanalysis 22 (2016), S. 78 - 79
ISSN: 1431-9276
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Graphene‐supported microwell liquid cell for in situ studies in TEM and SEM
European Microscopy Congress 2016 (Lyon, 28. August 2016 - 2. September 2016)
In: European Microscopy Congress 2016 Volume 1: Instrumentation and Methods 2016
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Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Trans Tech Publications Ltd, 2016
ISBN: 9783035710427
DOI: 10.4028/www.scientific.net/MSF.858.917 - , , , , , , , :
Metastable defects in proton implanted and annealed silicon
In: Solid State Phenomena 242 (2016), S. 169-174
ISSN: 1012-0394
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The efficiency of hydrogen-doping as a function of implantation temperature
Trans Tech Publications Ltd, 2016
ISBN: 9783038356080
DOI: 10.4028/www.scientific.net/SSP.242.175 - , , , , , :
Innovative Monolithic RC-Snubber for Fast Switching Power Modules
9th International Conference on Integrated Power Electronics Systems (CIPS) - , , , , , , :
Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
(2016), Art.Nr.: 7548452
ISSN: 15483770
DOI: 10.1109/DRC.2016.7548452
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Using SiC MOSFET’s full potential – Switching faster than 200 kV/μs
Trans Tech Publications Ltd, 2016
ISBN: 9783035710427
DOI: 10.4028/www.scientific.net/MSF.858.880 - , , , , , :
Materials Integration for Printed Zinc Oxide Thin-Film Transistors: Engineering of a Fully-Printed Semiconductor/Contact Scheme
In: Journal of Display Technology 12 (2016)
ISSN: 1551-319X
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Integrated galvanically isolated MOSFET and IGBT gate-driver circuit with switching speed control
41st Annual Conference of the IEEE Industrial Electronics Society, IECON 2015
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Ion implanted 4H-SiC UV pin-diodes for solar radiation detection – Simulation and characterization
In: Materials Science Forum 858 (2016), S. 1032-1035
ISSN: 0255-5476
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Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
In: MRS Advances 1 (2016), S. 2331-2336
ISSN: 2059-8521
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Nanoparticles size-dependently initiate self-limiting NETosis-driven inflammation
In: Proceedings of the National Academy of Sciences of the United States of America 113 (2016), S. E5856-E5865
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Screen-printed biochemical sensors for detection of ammonia levels in sweat - Towards integration with vital parameter monitoring sports gear
9th International Conference on Biomedical Electronics and Devices, BIODEVICES 2016 - Part of 9th International Joint Conference on Biomedical Engineering Systems and Technologies, BIOSTEC 2016
DOI: 10.5220/0005691501600165 - , , , , :
On the origin of threshold voltage instability under operating conditions of 4H-SiC n-channel MOSFETs
In: Materials Science Forum 858 (2016)
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.858.473 - , , :
Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
In: Journal of Applied Physics 119 (2016)
ISSN: 0021-8979
DOI: 10.1063/1.4939289 - , , , , , , :
Evaluation of a novel reactor concept for the process intensification and intelligent heat management in the hydrogenation and dehydrogenation of Liquid Organic Hydrogen Carriers
21st World Hydrogen Energy Conference 2016, WHEC 2016 (Saragossa, 13. Juni 2016 - 16. Juni 2016)
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Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
DOI: 10.1117/12.2248219 - , , , , :
Reliabe Data Link for Power Transfer Control in an Inductive Charging System for Electric Vehicles
IEEE MTT-S International Conference on Microwaves for Intelligent Mobility (San Diego, USA)
In: IEEE MTT-S International Conference on Microwaves for Intelligent Mobility 2016
DOI: 10.1109/ICMIM.2016.7533929 - , :
Mechanical Reliability of Power Electronic Systems
9th International Conference on Integrated Power Electronics Systems (Nuremberg, 8. März 2016 - 10. März 2016)
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Amyloidogenic amyloid-?-peptide variants induce microbial agglutination and exert antimicrobial activity
In: Scientific Reports 6 (2016), S. 32228
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Determination of Fowler-Nordheim tunneling parameters in Metal-Oxide-Semiconductor structure including oxide field correction using a vertical optimization method
In: Solid-State Electronics 122 (2016), S. 56-63
ISSN: 0038-1101
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Implementation of Simultaneous Energy and Data Transfer in a Contactless Connector
IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) (Austin, TX)
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Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
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ISSN: 0022-2461
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Simple Mathematical Operation-Based Calibration Method for Giant Magnetoresistive Current Sensor Applying B-Spline Modeling
In: IEEE Sensors Journal 16 (2016), S. 4733-4739
ISSN: 1530-437X
DOI: 10.1109/JSEN.2016.2558468 - , , , , , , , , , :
TiO2 Nanotubes: Nitrogen-Ion Implantation at Low Dose Provides Noble-Metal-Free Photocatalytic H-2-Evolution Activity
In: Angewandte Chemie International Edition 55 (2016), S. 3763-3767
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Inductive high data rate transmission for bearing systems
IEEE Topical Conference on Wireless Sensors and Sensor Networks, WiSNet 2016
DOI: 10.1109/WISNET.2016.7444332
2015
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Back side ablation of SiC diodes using a q-switched NIR laser
In: Journal of Laser Micro Nanoengineering 10 (2015), S. 190-194
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Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Trans Tech Publications Ltd, 2015
ISBN: 9783038354789
DOI: 10.4028/www.scientific.net/MSF.821-823.753 - , , , , , , , , , :
Hidden Electronics
In: Positionspapier des VDE, 2015, S. 1-24
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High Power Density Automotive Converters using SiC or GaN Power Devices
Automotive Power Electronics International Conference (APE)
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Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
In: Journal of Vacuum Science & Technology B 33 (2015)
ISSN: 1071-1023
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"Black" TiO2 Nanotubes Formed by High-Energy Proton Implantation Show Noble-Metal-co-Catalyst Free Photocatalytic H2-Evolution
In: Nano Letters 15 (2015), S. 6815-6820
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Assessment of dicing induced damage and residual stress on the mechanical and electrical behavior of chips
2015 65th IEEE Electronic Components and Technology Conference, ECTC 2015
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Bragg gratings in imprinted Ormocer® waveguides
24th International Conference on Plastic Optical Fibers, POF 2015
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Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
International Conference on Smart Energy Grid Engineering, SEGE 2015
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High-voltage monolithic 3D capacitors based on through-silicon-via technology
IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015
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SiC MOSFETs in hard-switching bidirectional DC/DC converters
Trans Tech Publications Ltd, 2015
ISBN: 9783038354789
DOI: 10.4028/www.scientific.net/MSF.821-823.689 - , :
A Novel Charge Based SPICE Model for Nonlinear Device Capacitances
3rd IEEE Workshop on Wide Bandgap Power Devices and Applications, WiPDA 2015
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Inverter Technology for High-Speed Drives Like Electric Turbochargers
10th ETG/GMM-Symposium on Innovative Small Drives and Micro-Motor Systems (IKMT) - , , , , , :
Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Trans Tech Publications Ltd, 2015
ISBN: 9783038354789
DOI: 10.4028/www.scientific.net/MSF.821-823.656 - , , , , :
Temperature dependent characterization of bipolar injection field- effect-transistors (BiFET) for determining the short-circuit-capability
Trans Tech Publications Ltd, 2015
ISBN: 9783038354789
DOI: 10.4028/www.scientific.net/MSF.821-823.806 - , , , , , , :
A DLTS study of hydrogen doped czochralski-grown silicon
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 365 (2015), S. 240-243
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2015.07.078 - , , , , , , , , :
Comparison of silicon and 4H silicon carbide patterning using focused ion beams
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 365 (2015), S. 44-49
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2015.07.079 - , , , , :
Silicon nitride, a high potential dielectric for 600 v integrated RC-snubber applications
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 33 (2015), Art.Nr.: 01A112
ISSN: 2166-2754
DOI: 10.1116/1.4906082 - , , , , , :
Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Trans Tech Publications Ltd, 2015
ISBN: 9783038354789
DOI: 10.4028/www.scientific.net/MSF.821-823.476 - , , , , :
Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
In: ACS Applied Materials and Interfaces 7 (2015), S. 17032 - 17043
ISSN: 1944-8244
DOI: 10.1021/acsami.5b03071
URL: http://pubs.acs.org/doi/abs/10.1021/acsami.5b03071 - , , , , :
Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
In: Materials Science in Semiconductor Processing 29 (2015), S. 124-131
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2013.12.030 - , , , , , :
Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
In: Physical Chemistry Chemical Physics 17 (2015), S. 22106-22114
ISSN: 1463-9076
DOI: 10.1039/c5cp03321g - , , , , :
Current conduction mechanism of MIS devices using multidimensional minimization system program
In: Microelectronics Reliability 55 (2015), S. 1028-1034
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2015.05.001 - , , , , , , :
Charge pumping measurements on differently passivated lateral 4H-SiC MOSFETs
In: IEEE Transactions on Electron Devices 62 (2015), S. 155-163
ISSN: 0018-9383
DOI: 10.1109/TED.2014.2372874 - , , :
Design and simulation of thermally optimized filter inductors for a 1mw windmill demonstrator
2015 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2015
URL: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84997418748∨igin=inward - , , :
Optimized filter inductors for a 1MW windmill demonstrator with an objective to reduced converter size
17th European Conference on Power Electronics and Applications, EPE-ECCE Europe 2015
DOI: 10.1109/EPE.2015.7309130 - , , :
Calculating phase currents for high frequency three phase inductors via the inductance matrix
2015 International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2015
URL: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84997417432&origin=inward - , , , , , , :
Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015
DOI: 10.1109/ASMC.2015.7164437 - , , , , :
Printing of Ultrathin Nanoparticulate Indium Tin Oxide Structures
International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT)
2014
- , , , , :
Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Trans Tech Publications Ltd, 2014
ISBN: 9783038350101
DOI: 10.4028/www.scientific.net/MSF.778-780.595 - , , , , :
Investigation of trenched and high temperature annealed 4H-SiC
Trans Tech Publications Ltd, 2014
ISBN: 9783038350101
DOI: 10.4028/www.scientific.net/MSF.778-780.742 - , , , , , , :
Reliability of monolithic RC-snubbers in MOS-based power modules
5th Electronics System-Integration Technology Conference, ESTC 2014
DOI: 10.1109/ESTC.2014.6962794 - , , , , , , , :
Numerical time-dependent 3D simulation of flow pattern and heat distribution in an ammonothermal system with various baffle shapes
In: Journal of Crystal Growth 403 (2014), S. 96-104
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2014.06.007 - , , , , , , , , :
Galvanically isolated differential data transmission using capacitive coupling and a modified Manchester algorithm for smart power converters
2014 IEEE 23rd International Symposium on Industrial Electronics, ISIE 2014 (Istanbul)
DOI: 10.1109/ISIE.2014.6865029 - , , , , :
Thickness mapping of high-κ dielectrics at the nanoscale
In: Applied Physics Letters 104 (2014), Art.Nr.: 052907
ISSN: 0003-6951
DOI: 10.1063/1.4863947 - , , , :
Analytical stress characterization after different chip separation methods
In: Microelectronics Reliability 54 (2014), S. 1735-1740
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2014.07.086 - , , , , :
Modification of polypropylene films for thin film capacitors by ion implantation
20th International Conference on Ion Implantation Technology, IIT 2014
DOI: 10.1109/IIT.2014.6939968 - , , :
Characterization and Application of 600 V Normally-Off GaN Transistors in Hard Switching DC/DC Converters
26th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2014 (Waikoloa, HI)
DOI: 10.1109/ISPSD.2014.6855976 - , , :
Comparison of Si/SiC semiconductor performance using experiment-based simulation
International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2014 (Nuremberg)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-84906535889∨igin=inward - , , , , , , , , , , :
Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Trans Tech Publications Ltd, 2014
ISBN: 9783038350101
DOI: 10.4028/www.scientific.net/MSF.778-780.487 - , , , , :
Experimental analysis of bipolar SiC-devices for future energy distribution systems
2014 16th European Conference on Power Electronics and Applications, EPE-ECCE Europe 2014
DOI: 10.1109/EPE.2014.6910847 - , , , , , , :
New method to increase the doping efficiency of proton implantation in a high-dose regime
13th High Purity and High Mobility Semiconductor Symposium - 2014 ECS and SMEQ Joint International Meeting
DOI: 10.1149/06411.0199ecst - , , , , , , :
Deep-level defects in high-dose proton implanted and high-temperature annealed silicon
13th High Purity and High Mobility Semiconductor Symposium - 2014 ECS and SMEQ Joint International Meeting
DOI: 10.1149/06411.0173ecst - , , , , , , :
MeV-proton channeling in crystalline silicon
20th International Conference on Ion Implantation Technology, IIT 2014
DOI: 10.1109/IIT.2014.6940059 - , , , , , :
Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors
In: ACS Applied Materials and Interfaces 6 (2014), S. 12245-12251
ISSN: 1944-8244
DOI: 10.1021/am501837u - , , , , , :
Measurement and Prediction of the Thermal Conductivity of Tricyanomethanide- and Tetracyanoborate-Based Imidazolium Ionic Liquids
In: International Journal of Thermophysics 35 (2014), S. 195-217
ISSN: 0195-928X
DOI: 10.1007/s10765-014-1617-1 - , , , , , , , , , , , :
Optical polymers with tunable refractive index for nanoimprint technologies
In: Nanotechnology 25 (2014), S. Article number 505301
ISSN: 1361-6528
DOI: 10.1088/0957-4484/25/50/505301 - , , , , , , :
DLTS characterization of proton-implanted silicon under varying annealing conditions
In: Physica Status Solidi 251 (2014), S. 2189-2192
ISSN: 0031-8957
DOI: 10.1002/pssb.201400028 - , , , , , , , , , , , , , , , , :
Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
In: ACS Applied Materials and Interfaces 6 (2014), S. 2486-2492
ISSN: 1944-8244
DOI: 10.1021/am4049139 - , , , , , :
Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Trans Tech Publications Ltd, 2014
ISBN: 9783038350101
DOI: 10.4028/www.scientific.net/MSF.778-780.702 - , , , , :
High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
In: Thin Solid Films 553 (2014), S. 114-117
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.11.061 - , , , , , , , , :
Bioactivation of plane and patterned PDMS thin films by wettability engineering
In: BioNanoScience 4 (2014), S. 251-262
ISSN: 2191-1630
DOI: 10.1007/s12668-014-0145-6 - , , , , , , :
In Situ Visualization of GaN Crystals in Ammonothermal High Pressure Autoclaves by X-ray Imaging
German Conference on Crystal Growth (Halle, 12. März 2014 - 14. März 2014) - , , , :
Analytical calculation of copper losses in litz-wire windings of gapped inductors
In: IEEE Transactions on Magnetics 50 (2014), Art.Nr.: 6748958
ISSN: 0018-9464
DOI: 10.1109/TMAG.2013.2282333 - , , :
A new generation of modular power inductors with minimum thermal resistance
2014 16th European Conference on Power Electronics and Applications, EPE-ECCE Europe 2014
DOI: 10.1109/EPE.2014.6910771 - , , :
High frequency high current filter inductors with minimum thermal resistance
16th International Power Electronics and Motion Control Conference and Exposition, PEMC 2014
DOI: 10.1109/EPEPEMC.2014.6980507 - , , , , , , , , , , , :
Systematic analysis of the high-and low-field channel mobility in lateral 4H-SiC MOSFETs
15th International Conference on Silicon Carbide and Related Materials, ICSCRM 2013 (Miyazaki)
In: Silicon Carbide and Related Materials 2013 2014
DOI: 10.4028/www.scientific.net/MSF.778-780.583 - , , , , , , , , , :
Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography
In: Journal of Micro-Nanolithography MEMS and MOEMS 13 (2014)
ISSN: 1932-5150
DOI: 10.1117/1.JMM.13.4.043003 - , , , , , , , , , , , :
Enabling Large Area and High Throughput Roll-to-Roll NIL by Novel Inkjetable and Photo-curable NIL-Resists
DOI: 10.1117/12.2046279
2013
- , , , , , :
Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
In: Journal of Laser Micro Nanoengineering 8 (2013), S. 97-101
ISSN: 1880-0688
DOI: 10.2961/jlmn.2013.01.0019
(Zeitungsartikel) - , , , , :
Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
2013
ISBN: 9783037856246
DOI: 10.4028/www.scientific.net/MSF.740-742.691 - , , , , , :
Laser melting of nanoparticulate transparent conductive oxide thin films
In: Journal of Laser Micro Nanoengineering 8 (2013), S. 144-148
ISSN: 1880-0688
DOI: 10.2961/jlmn.2013.02.0005 - , , , , :
Optimization of copper top-side metallization for high performance SiC-devices
2013
ISBN: 9783037856246
DOI: 10.4028/www.scientific.net/MSF.740-742.801 - , , , , , , , , :
Functional epoxy polymer for direct nano-imprinting of micro-optical elements
In: Microelectronic Engineering 110 (2013), S. 90-93
ISSN: 0167-9317
DOI: 10.1016/j.mee.2013.02.030 - , , , , , , , , :
Accuracy of wafer level alignment with substrate conformal imprint lithography
In: Journal of Vacuum Science & Technology B 31 (2013), S. 6FB02
ISSN: 1071-1023
DOI: 10.1116/1.4824696 - , , , , , , , , , , :
Melt Depth and Time Variations during Pulsed Laser Thermal Annealing with One and More Pulses,
In: Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European, 2013, S. 214-217
DOI: 10.1109/ESSDERC.2013.6818857 - , , , , , , , , :
Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
2013
ISBN: 9783037856246
DOI: 10.4028/www.scientific.net/MSF.740-742.887 - , , , , , , :
Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
2013
ISBN: 9783037856246
DOI: 10.4028/www.scientific.net/MSF.740-742.773 - , , , , , , , , , , , :
Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
In: Microelectronic Engineering 109 (2013), S. 129-132
ISSN: 0167-9317
DOI: 10.1016/j.mee.2013.03.022 - , , , , , :
Towards bulk-like 3C-SiC growth using low off-axis substrates
In: Materials Science Forum 740-742 (2013), S. 275-278
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/msf.740-742.275 - , , , , , :
Conceptional design of nano-particulate ITO inks for inkjet printing of electron devices
In: Journal of Materials Science 48 (2013), S. 1623-1631
ISSN: 0022-2461
DOI: 10.1007/s10853-012-6919-8 - , , , , , :
Activation and dissociation of proton-induced donor profiles in silicon
In: ECS Journal of Solid State Science and Technology 2 (2013)
ISSN: 2162-8769
DOI: 10.1149/2.028309jss - , , , , :
Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
2013
ISBN: 9783037856246
DOI: 10.4028/www.scientific.net/MSF.740-742.521 - , , , , , :
Conduction mechanisms in thermal nitride and dry gate oxides grown on 4H-SiC
In: Microelectronics Reliability 53 (2013), S. 1841-1847
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2013.06.009 - , , , , , , , :
Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 31 (2013), Art.Nr.: 01A108
ISSN: 2166-2754
DOI: 10.1116/1.4768679 - , , , , :
Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
In: Microelectronic Engineering 110 (2013), S. 177-182
ISSN: 0167-9317
DOI: 10.1016/j.mee.2013.03.081 - , , , , , :
Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
In: Nanotechnology 24 (2013), S. 365302
ISSN: 0957-4484
DOI: 10.1088/0957-4484/24/36/365302 - , , , :
The simulation of copper losses in litz-wire windings considering air gap fringing fields
International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2013 (Nuremberg)
URL: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84906347177∨igin=inward - , , , , , , , :
Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
DOI: 10.1149/05804.0071ecst
2012
- , , , :
In situ monitoring technologies for ammonthermal reactors
In: Physica Status Solidi (C) Current Topics in Solid State Physics 9 (2012), S. 436-439
ISSN: 1862-6351
DOI: 10.1002/pssc.201100361 - , , , , , :
Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget
In: Applied Physics A-Materials Science & Processing 107 (2012), S. 269-273
ISSN: 0947-8396
DOI: 10.1007/s00339-012-6871-0 - , , , , :
4H-SiC MOSFETs with a stable protective coating for harsh environment applications
2012
ISBN: 9783037854198
DOI: 10.4028/www.scientific.net/MSF.717-720.1089 - , , , , :
Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
In: ECS Journal of Solid State Science and Technology 1 (2012)
ISSN: 2162-8769
DOI: 10.1149/2.019201jss - , , :
Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
In: IEEE Transactions on Electron Devices 59 (2012), S. 3470-3476
ISSN: 0018-9383
DOI: 10.1109/TED.2012.2220777 - , , , , , :
Ohmic and rectifying contacts on bulk AlN for radiation detector applications
In: Physica Status Solidi (C) Current Topics in Solid State Physics 9 (2012), S. 968-971
ISSN: 1862-6351
DOI: 10.1002/pssc.201100341 - , , , , , :
Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
24th International Symposium on Power Semiconductor Devices and ICs, ISPSD'12 (Bruges)
DOI: 10.1109/ISPSD.2012.6229078 - , , , , , , , , :
Novel organic polymer for UV-enhanced substrate conformal imprint lithography
In: Microelectronic Engineering 98 (2012), S. 238-241
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.07.010 - , , , :
Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
In: Solid-State Electronics 75 (2012), S. 33-36
ISSN: 0038-1101
DOI: 10.1016/j.sse.2012.05.004 - , , :
Reverse recovery of All-SiC switches
International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2012 (Nuremberg)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-84874123396∨igin=inward - , , , , :
Modular inverter power electronic for intelligent e-drives
2012 2nd International Electric Drives Production Conference, EDPC 2012 (Nuremberg)
DOI: 10.1109/EDPC.2012.6425132 - , , :
Purity of ion beams: Analysis and simulation of mass spectra and mass interferences in ion implantation
In: Advances in Materials Science and Engineering 2012 (2012), Art.Nr.: 610150
ISSN: 1687-8434
DOI: 10.1155/2012/610150 - , , , , , , , :
A switch for epitaxial graphene electronics: Utilizing the silicon carbide substrate as transistor channel
In: Applied Physics Letters 100 (2012), S. 122102
ISSN: 0003-6951
DOI: 10.1063/1.3695157 - , , , , , :
The thermal budget of hydrogen-related donor profiles: Diffusion-limited activation and thermal dissociation
12th High Purity Silicon Symposium - 222nd ECS Meeting (Honolulu, HI)
DOI: 10.1149/05005.0161ecst - , , , , , :
Smart battery cell monitoring with contactless data transmission
16th International Forum on Advanced Microsystems for Automotive Applications, AMAA 2012 (Berlin)
DOI: 10.1007/978-3-642-29673-4_2 - , , , , , , :
Novel cost-efficient contactless distributed monitoring concept for smart battery cells
21st IEEE International Symposium on Industrial Electronics, ISIE 2012 (Hangzhou)
DOI: 10.1109/ISIE.2012.6237285 - , , , , , , :
Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
19th International Conference on Ion Implantation Technology 2012, IIT 2012 (Valladolid)
DOI: 10.1063/1.4766542 - , , , , , :
Nanosecond polarization switching and long retention in a novel MFIS-FET based on ferroelectric HfO 2
In: IEEE Electron Device Letters 33 (2012), S. 185-187
ISSN: 0741-3106
DOI: 10.1109/LED.2011.2177435 - , , , , , , , :
Ferroelectricity in simple binary ZrO 2 and HfO 2
In: Nano Letters 12 (2012), S. 4318-4323
ISSN: 1530-6984
DOI: 10.1021/nl302049k - , , , , , :
Intrinsic MOSFET leakage of high-k peripheral DRAM devices: Measurement and simulation
2012 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2012 (Hsinchu)
DOI: 10.1109/VLSI-TSA.2012.6210165 - , , :
Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
In: Microelectronic Engineering 98 (2012), S. 242-245
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.07.009 - , , , , , , , :
Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
In: Journal of Applied Physics 112 (2012), Art.Nr.: 034909
ISSN: 0021-8979
DOI: 10.1063/1.4746742 - , , , , , , , :
Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
In: Microelectronic Engineering 98 (2012), S. 275-278
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.04.032 - Schmitt H, Jäger J, et al:
Application and Feasibility of Fault Current Limiters in Power Systems
In: Electra (2012), S. 51-57
ISSN: 0424-7701 - , , , , :
Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
2012 7th International Conference on Integrated Power Electronics Systems, CIPS 2012 (Nuremberg)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-84881091503∨igin=inward - , , :
Nonlinear inductors for active power factor correction circuits
15th International Power Electronics and Motion Control Conference and Exposition, EPE-PEMC 2012 ECCE Europe (Novi Sad)
DOI: 10.1109/EPEPEMC.2012.6397508 - , , :
Nonlinear power inductors for large current crest factors
International Exhibition and Conference for Power Electronics, Intelligent Motion, Renewable Energy and Energy Management, PCIM Europe 2012 (Nuremberg)
URL: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84874154772∨igin=inward
2011
- , , , , , , :
Structural defects in aluminium nitride bulk crystals visualized by cathodoluminescence maps
In: Physica Status Solidi (C) Current Topics in Solid State Physics 8 (2011), S. 2235–2238
ISSN: 1862-6351
DOI: 10.1002/pssc.201000864 - , , , , , :
Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications
In: Thin Solid Films 519 (2011), S. 5892-5898
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.02.089 - , , , , :
Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications
In: Journal of Electronic Materials 40 (2011), S. 1990-1997
ISSN: 0361-5235
DOI: 10.1007/s11664-011-1681-2 - , , , , :
Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications
2011 IMAPS International Conference on High Temperature Electronics Network, HiTEN 2011 (Oxford)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-84876889044∨igin=inward - , , , , , , :
Comparative study on metallization and passivation materials for high temperature sensor applications
2011
ISBN: 9783037850794
DOI: 10.4028/www.scientific.net/MSF.679-680.449 - , , , , :
Gate oxide reliability at the nanoscale evaluated by combining conductive atomic force microscopy and constant voltage stress
In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 29 (2011), S. 01AB08
ISSN: 0734-211X
DOI: 10.1116/1.3532820 - , , , , :
Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 29 (2011)
ISSN: 2166-2754
DOI: 10.1116/1.3521471 - , , , , , , , :
4H-SiC n-MOSFET logic circuits for high temperature operation
2011
ISBN: 9783037850794
DOI: 10.4028/www.scientific.net/MSF.679-680.734 - , , :
Verbesserung der Detektion sphärischer Marker für die optische Navigationschirurgie.
10. Jahrestagung der Deutschen Gesellschaft für Computer- und Roboterassistierte Chirurgie (Magedeburg, 15. September 2011 - 16. September 2011)
In: Bugert O, Schipper J, Zachow S (Hrsg.): Proceedings, 10. Jahrestagung der Deutschen Gesellschaft für Computer- und Roboterassistierte Chirurgie 2011 - , , , :
Thermal characterization of an axle-twin-drive with system integrated double-inverter
1st International Electric Drives Production Conference, EDPC-2011 (Nuremberg)
DOI: 10.1109/EDPC.2011.6085560 - , , , , , , :
Effects of oxygen and forming gas annealing on ZnO TFTs
2010 MRS Fall Meeting (Boston, MA)
DOI: 10.1557/opl.2011.1144 - , , , , , :
Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V (San Diego, CA)
DOI: 10.1117/12.893306 - , , , , , :
Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
In: Microelectronic Engineering 88 (2011), S. 2584-2588
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.12.022 - , , , , , :
EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane
In: Physica Status Solidi 5 (2011), S. 244-246
ISSN: 0031-8957
DOI: 10.1002/pssr.201105208 - , , , , , , :
Germanium substrate loss during thermal processing
In: Microelectronic Engineering 88 (2011), S. 499-502
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.08.031 - , , , , , , , , , , :
Experiments and simulation of the diffusion and activation of the n-type dopants P, As, and Sb implanted into germanium
In: Microelectronic Engineering 88 (2011), S. 458-461
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.09.023 - , , , , , :
Dopant profiles in silicon created by MeV hydrogen implantation: Influence of annealing parameters
In: Physica Status Solidi (C) Current Topics in Solid State Physics 8 (2011), S. 697--700
ISSN: 1862-6351
DOI: 10.1002/pssc.201000161 - , , , , , , :
Conversion efficiency of radiation damage profiles into hydrogenrelated donor profiles
Trans Tech Publications Ltd, 2011
ISBN: 9783037852323
DOI: 10.4028/www.scientific.net/SSP.178-179.375 - , , , , , , , :
Investigation of the reliability of 4H-SiC MOS devices for high temperature applications
In: Microelectronics Reliability 51 (2011), S. 1346-1350
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2011.03.015 - , , , , , , , :
A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
In: International Journal of Electronics 98 (2011), S. 1025-1054
ISSN: 0020-7217
DOI: 10.1080/00207217.2011.567035 - , , , , , , , , :
Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications
In: Applied Physics Letters 99 (2011), Art.Nr.: 112901
ISSN: 0003-6951
DOI: 10.1063/1.3636417 - , , , , :
Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Frontiers of Characterization and Metrology for Nanoelectronics: 2011 (Grenoble)
DOI: 10.1063/1.3657879 - , , , , , :
A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
In: Journal of Applied Physics 110 (2011), Art.Nr.: 054104
ISSN: 0021-8979
DOI: 10.1063/1.3631088 - , , , , , , , , , , :
Ferroelectricity in yttrium-doped hafnium oxide
In: Journal of Applied Physics 110 (2011), S. Article number 114113
ISSN: 0021-8979
DOI: 10.1063/1.3667205 - , , , :
Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
In: Journal of Applied Physics 109 (2011), Art.Nr.: 076101
ISSN: 0021-8979
DOI: 10.1063/1.3565056 - , , :
Leakage current and defect characterization of p+n-source/drain diodes
In: Microelectronics Reliability 51 (2011), S. 2081-2085
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2011.05.015 - , , , , , :
Impact of carbon junction implant on leakage currents and defect distribution: Measurement and simulation
In: Solid-State Electronics (2011), S. 170-176
ISSN: 0038-1101
DOI: 10.1016/j.sse.2011.06.016 - , , , , , :
Analysis of the effect of germanium preamorphization on interface defects and leakage current for high-k metal-oxide-semiconductor field-effect transistor
In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 29 (2011)
ISSN: 0734-211X
DOI: 10.1116/1.3521479 - , , , :
Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC
2011
ISBN: 9783037850794
DOI: 10.4028/www.scientific.net/MSF.679-680.417 - , , , , , , :
Jet printing of colloidal solutions - Numerical modeling and experimental verification of the influence of ink and surface parameters on droplet spreading
In: Advanced Powder Technology 22 (2011), S. 266-270
ISSN: 0921-8831
DOI: 10.1016/j.apt.2011.02.003 - , , , , , :
Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment
In: Advanced Powder Technology 22 (2011), S. 253-256
ISSN: 0921-8831
DOI: 10.1016/j.apt.2011.01.012 - , , , , , :
Properties of SiO2 and Si3 N4 as gate dielectrics for printed ZnO transistors
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 29 (2011)
ISSN: 2166-2754
DOI: 10.1116/1.3524291 - , , , , , , , :
Conduction Mechanisms and Environmental Sensitivity of Solution-Processed Silicon Nanoparticle Layers for Thin-Film Transistors
In: Small 7 (2011), S. 2853-2857
ISSN: 1613-6829
DOI: 10.1002/smll.201100703 - , , , :
Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 29 (2011)
ISSN: 0734-211X
DOI: 10.1116/1.3532822 - , , , , , :
Monolithic RC-snubber for power electronic applications
2011 IEEE 9th International Conference on Power Electronics and Drive Systems, PEDS 2011 (Singapore)
DOI: 10.1109/PEDS.2011.6147217 - , , , , :
Dielectric layers suitable for high voltage integrated trench capacitors
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 29 (2011)
ISSN: 2166-2754
DOI: 10.1116/1.3525283
2010
- , , , :
Coupling of Equipment and Feature-Scale Profile Simulation for Dry-Etching of Polysilicon Gate Lines
Workshop (Bologna)
In: Proceedings of SISPAD 2010 2010 - , , , , , :
Silicon Carbide and Related Materials 2009 - Parts 1 and 2
Stafa-Zuerich: Trans Tech Publications, 2010
(Materials Science Forum, Bd.645-648)
ISBN: 0-87849-279-8 - , , , , :
A Highly Integrated EMI Filter Using Polymer Bonded Soft Magnetics as Core Material
IEEE Applied Power Electronics Conference (APEC) (Palm Springs) - , , :
Mask diffraction analysis and optimization for EUV masks
DOI: 10.1117/12.814119 - , , :
Reduced on resistance in LDMOS devices by integrating trench gates into planar technology
In: IEEE Electron Device Letters 31 (2010), S. 464-466
ISSN: 0741-3106
DOI: 10.1109/LED.2010.2043049 - , , , , :
Effective work function tuning in high-κ dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping
In: Applied Physics Letters 96 (2010), Art.Nr.: 053506
ISSN: 0003-6951
DOI: 10.1063/1.3303976 - , , , , :
Modeling of the effective work function instability in metal/high-κ dielectric stacks
In: Journal of Applied Physics 107 (2010), Art.Nr.: 124514
ISSN: 0021-8979
DOI: 10.1063/1.3391280 - , , :
Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
In: Semiconductor Science and Technology 25 (2010)
ISSN: 0268-1242
DOI: 10.1088/0268-1242/25/7/075009 - , , , , :
Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
In: Semiconductor Science and Technology 25 (2010), Art.Nr.: 045009
ISSN: 0268-1242
DOI: 10.1088/0268-1242/25/4/045009 - , , , , , :
Topography-aware BARC optimization for double patterning
SPIE Advanced Lithography (San Jose, 23. Februar 2010 - 25. Februar 2010)
In: Proceedings of the SPIE 2010
DOI: 10.1117/12.846441 - , , , , , :
Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
In: Microelectronic Engineering 87 (2010), S. 1123-1126
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.11.040 - , , , , , , , , , :
Honeycomb voids due to ion implantation in germanium
In: Thin Solid Films 518 (2010), S. 2323-2325
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.09.138 - , , , , :
Aerosol synthesis of silicon nanoparticles with narrow size distribution-Part 1: Experimental investigations
In: Journal of Aerosol Science 41 (2010), S. 998--1007
ISSN: 0021-8502
DOI: 10.1016/j.jaerosci.2010.05.007 - , , , , , , , , :
The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon
In: ECS Transactions 33 (2010), S. 51-62
ISSN: 1938-5862
DOI: 10.1149/1.3485682 - , , , , , , , :
NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications
Trans Tech Publications Ltd, 2010
ISBN: 9780878492794
DOI: 10.4028/www.scientific.net/MSF.645-648.1143 - , , , , , , :
Light-load efficiency increase in high-frequency integrated DC-DC converters by parallel dynamic width controlling
In: Analog Integrated Circuits and Signal Processing 62 (2010), S. 1-8
ISSN: 0925-1030
DOI: 10.1007/s10470-009-9323-9 - , , , , :
Future challenges in CMOS process modeling
In: Thin Solid Films 518 (2010), S. 2478-2484
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.09.150 - , , , , , :
Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
In: Microelectronic Engineering 87 (2010), S. 1566-1568
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.10.054 - , , , , , , , , :
Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 28 (2010), S. 595-607
ISSN: 0734-211X
DOI: 10.1116/1.3431085 - , , , , , , , :
Full wafer microlens replication by UV imprint lithography
In: Microelectronic Engineering 87 (2010), S. 1074--1076
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.11.069 - , , , , , , :
Influence of annealing temperature and measurement ambient on TFTs based on gas phase synthesized ZnO nanoparticles
In: Microelectronic Engineering 87 (2010), S. 2312-2316
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.03.009
2009
- , , , , , :
Polymer bonded soft magnetics for EMI filter applications
3rd Int. Conference on Automotive Power Electronics (APE) (Paris, 25. März 2009 - 26. März 2009) - , , , , , :
A model of self-limiting residual acid diffusion for pattern doubling
In: Microelectronic Engineering 86 (2009), S. 792
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.10.023 - , , :
Finite integration (FI) method for modeling optical wavers in lithography masks
7th International Fraunhofer IISB Lithography Simulation Workshop (Hersbruck)
In: 7th International Fraunhofer IISB Lithography Simulation Workshop 2009 - , , , , :
Lanthanum implantation for threshold voltage control in metal/high-k devices
In: Microelectronic Engineering 86 (2009), S. 1782-1785
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.03.042 - , , , , , , , , , , :
Optimization of illumination pupils and mask features for proximity printing
Micro- and Nano-Engineering (Ghent, Belgium)
In: Micro- and Nano-Engineering 2009
DOI: 10.1016/j.mee.2009.10.038 - , , , , , , , , , :
Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition
In: Microelectronic Engineering 86 (2009), S. 1818-1821
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.03.076 - , , , , :
Advanced lithography models for strict process control in the 32nm technology node
In: Microelectronic Engineering 86 (2009), S. 513
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.01.050 - , , , :
Extraordinary low transmission effects for ultra-thin patterned metal films
In: Optics Express 17 (2009), S. 544
ISSN: 1094-4087
DOI: 10.1364/OE.17.000544 - , , , :
Efficient Analysis of Three Dimensional EUV Mask Induced Imageing Artifacts Using the Waveguide Decomposition Method
BACUS (Monterey)
In: BACUS 2009
DOI: 10.1117/12.833464 - , , , :
Rigorous diffraction simulations of topographic wafer stacks in double patterning
In: Microelectronic Engineering 86 (2009), S. 289
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.11.078 - , , , , :
Preparation and soft lithographic printing of nano-sized ITO-dispersions for the manufacture of electrodes for TFTs
In: Journal of Materials Science 44 (2009), S. 6011 - 6019
ISSN: 0022-2461
DOI: 10.1007/s10853-009-3804-1
URL: http://link.springer.com/article/10.1007%2Fs10853-009-3804-1 - , , , , :
Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
In: Microelectronic Engineering 86 (2009), S. 1911-1914
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.03.094
2008
- , , :
Polymer bonded soft magnetic particles for planar inductive devices
5th International Conference on Integrated Power Systems (CIPS) (Nürnberg)
URL: https://ieeexplore.ieee.org/document/5755689?arnumber=5755689 - , , , , , , , :
Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition
In: Journal of The Electrochemical Society 155 (2008), S. H693-H697
ISSN: 0013-4651
DOI: 10.1149/1.2957907 - , , , , :
Modeling of the Diffusion and Activation of Arsenic in Silicon Including Clustering and Precipitation
Gettering and Defect Engineering in Semiconductor Technology XII (Italien, 14. Oktober 2007 - 19. Oktober 2007)
In: Gettering and Defect Engineering in Semiconductor Technology XII 2008
DOI: 10.4028/www.scientific.net/SSP.131-133.277 - , , , , , , , , , , , , , :
Detailed arsenic concentration profiles at Si/SiO2 interfaces
In: Journal of Applied Physics 104 (2008), Art.Nr.: 043507
ISSN: 0021-8979
DOI: 10.1063/1.2967713 - , , :
Detailed Carrier Lifetime Analysis of Iron-Contaminated Boron-doped Silicon by Comparison of Simulation and Measurement
In: Journal of The Electrochemical Society 155 (2008), S. H117
ISSN: 0013-4651
DOI: 10.1149/1.2819628
2007
- , , , , :
Application of a memetic algorithm to the calibration of micro-lithography
In: Grosan, Crina; Abraham, Ajith (Hrsg.): Hybrid Evolutionary Algorithms, Berlin Heidelberg: Springer, 2007, S. 201-239
ISBN: 978-3-540-73296-9
DOI: 10.1007/978-3-540-73297-6 - , , , , , :
Impurity Conduction in Silicon Carbide
In: Materials Science Forum 556-557 (2007), S. 364
ISSN: 0255-5476 - , , , , , , , , :
MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications
In: Chemical Vapor Deposition 13 (2007), S. 105-111
ISSN: 0948-1907
DOI: 10.1002/cvde.200606511 - , , , , :
UV nanoimprint materials: Surface energies, residual layers, and imprint quality
In: Journal of Vacuum Science & Technology B 25 (2007), S. 785-790
ISSN: 1071-1023
DOI: 10.1116/1.2732742 - , , , :
Cathodoluminescence characterization of organic semiconductor materials for light emitting device applications
In: Journal of Applied Physics 101 (2007)
ISSN: 0021-8979
DOI: 10.1063/1.2743090
2006
- S.E. Berberich, M. Marz, A.J. Bauer, S.K. Beuer, H. Ryssel:
Active Fuse
2006 IEEE International Symposium on Power Semiconductor Devices and IC's (Naples, 4. Juni 2006 - 8. Juni 2006)
In: Symposium on Power Semiconductor Devices and IC's 2006
DOI: 10.1109/ISPSD.2006.1666088 - , :
Untersuchung von Aufladungseffekten bei der Ionenimplantation
Aachen: Shaker Verlag, 2006
(Erlanger Berichte Mikroelektronik)
ISBN: 3-8322-5081-6 - , , , , , , :
Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes
In: Nano Letters 6 (2006), S. 1080-1082
ISSN: 1530-6984
DOI: 10.1021/nl0600979 - , , :
The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations
ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006 (Marseille)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-33846941211&origin=inward - , , , :
Well Design in a Bulk CMOS Technology with Low Mask Count
2006 16th International Conference on Ion Implantation Technology (Marseille, 11. Juni 2006 - 16. November 2006)
In: AIP Conference Proceedings Volume 866, Issue 1 2006
DOI: 10.1063/1.2401476 - , , , , , , , , , , :
Simulation of ion beam direct structuring for 3D nanoimprint template fabrication
In: Microelectronic Engineering 83 (2006), S. 936-939
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.01.140 - , , , , , , , , , , , , , , :
Creation of E-Learning Content for Microelectronics Manufacturing
12th IFAC Symposium on Information Control Problems in Manufacturing (Saint-Etienne, France, 17. Mai 2006 - 19. Mai 2006)
In: Proceeding of the 12th IFAC Symposium on Information Control Problems in Manufacturing 2006 - , , , , , , , :
Nanoscale morphology and photoemission of arsenic implanted germanium films
In: Journal of Applied Physics 99 (2006)
ISSN: 0021-8979
DOI: 10.1063/1.2190717 - , , , :
Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements
2006
ISBN: 9780878494255
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-37849042244&origin=inward
2005
- , , , , :
Thin HfxTiySixO films with varying Hf to Ti contents as candidates for high-k dielectrics
207th ECS Meeting (Quebec)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-31844445401&origin=inward - , , , :
Triple trench gate IGBTs
17th International Symposium on Power Semiconductor Devices and ICs, ISPSD'05 (Sanata Barbara, CA)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-27744589892&origin=inward - , , , , , , , , , , , :
THz-photomixer based on quasi-ballistic transport
In: Semiconductor Science and Technology 20 (2005)
ISSN: 0268-1242
DOI: 10.1088/0268-1242/20/7/007 - , , :
Chemical vapor phase precipitation of new materials for sub 50 nm transistors Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren
In: Chemie Ingenieur Technik 77 (2005), S. 1215-1216
ISSN: 0009-286X
DOI: 10.1002/cite.200590331 - , , , , :
Investigations into the wear of a WL10 ion source
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 237 (2005), S. 341-345
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.05.011 - , , :
Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 237 (2005), S. 346-350
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.05.012 - , , , , , :
Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor
In: Microelectronics Reliability 45 (2005), S. 819-822
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2004.11.040 - , , , , , , , :
High-k Hafnium Silicate Films on Silicon and Germanium Wafers by MOCVD Using a Single-Source Precursor
In: Proceedings of the 15th European Conference on Chemical Vapor Deposition (EUROCVD-15), Electrochemical Society, -: The Electrochemical Society, Inc., 2005, S. 873 - , , , , , :
High Al-doping of SiC using a modified PVT (M-PVT) growth set-up
In: Materials Science Forum 483 (2005), S. 31-34
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.483-485.31 - , , , , :
Annealing of Aluminium Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing
In: Materials Science Forum 483-485 (2005), S. 483
ISSN: 0255-5476 - , , , , , , :
Implantation and Annealing of Aluminum in 4H Silicon Carbide
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 237 (2005), S. 68-71
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.04.079 - , , , , , , :
Characterization of interface state densitiesby photocurrent analysis: Comparison of results for different insulator layers
In: Microelectronic Engineering 80 (2005), S. 50-53
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.04.042 - , , , , :
Wafer scale characterization of interface state densities without test structures by photocurrent analysis
35th European Solid State Device Research Conference (Grenoble)
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-31744443828&origin=inward - , , :
Ion Sputtering at Grazing Incidence for SIMS-Analysis
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 228 (2005), S. 373-377
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.10.073 - , , , , :
Photoluminescence study of in-situ rare earth doped PVT-grown SiC single crystals
In: Materials Science Forum 483 (2005), S. 445-448
ISSN: 0255-5476
DOI: 10.4028/www.scientific.net/MSF.483-485.445
2004
- , , , , :
Investigation of rapid thermal annealed pn-junctions in SiC
2004
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-8744264042&origin=inward - , , , , :
Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems
1st European Workshop on Hardware Optimisation (EVOHOT2004) (Coimbra, 3. April 2004 - 5. April 2004)
In: Günther R. Raidl, Stefano Cagnoni, Jürgen Branke, David Wolfe Corne, Rolf Drechsler, Yaochu Jin, Colin G. Johnson, Penousal Machado, Elena Marchiori, Franz Rothlauf, George D. Smith, Giovanni Squillero (Hrsg.): Applications of Evolutionary Computing - EvoWorkshops 2004: EvoBIO, EvoCOMNET, EvoHOT, EvoISAP, EvoMUSART, and EvoSTOC, Berlin Heidelberg: 2004
DOI: 10.1007/978-3-540-24653-4_22 - , , , , , :
Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams
In: Journal of Vacuum Science & Technology B 22 (2004), S. 1402-1406
ISSN: 1071-1023
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-3242722353∨igin=inward - , , , , , :
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
In: Microelectronic Engineering 72 (2004), S. 315-320
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.01.010 - , , , :
Modeling of Chemical-Mechanical Polishing on Patterned Wafers as Part of Integrated Topography Process Simulation
MAM2004 (Leuven, Belgium, 7. März 2004 - 10. März 2004)
In: Microelectronic Engineering 2004
DOI: 10.1016/j.mee.2004.07.018
URL: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6V0W-4D1V29P-2-C&_cdi=5657&_user=746735&_orig=browse&_coverDate=10/01/2004&_sk=999239998&view=c&wchp=dGLbVlb-zSkzk&md5=4039dffb5d8e4b57dba393cf896acaef&ie=/sdarticle.pdf - , , , :
Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios
DOI: 10.1063/1.1702101 - , , , , , , , :
Optical Characterization of Ferroelectric Strontium-Bismut-Tantalate (SBT) Thin Films
In: Thin Solid Films 455-456 (2004), S. 495-499
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2003.11.248 - , , :
Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics
2004
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-8644276383&origin=inward - , , , :
Design, fabrication and characterization of a microactuator for nebulization of fluids
2003
- , , , , , , , :
Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC
2003
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-18744421066&origin=inward - , , , :
Trench sidewall doping for lateral power devices
33rd European Solid-State Device Research Conference, ESSDERC 2003
DOI: 10.1109/ESSDERC.2003.1256893 - , , , , , , :
Influence of Antenna Shape and Resist Patterns on Charging Damage During Ion Implantation
Ion Implantation Technology (Taos, New Mexico, USA)
In: IEEE Proc. on Ion Implantation Technology-2002, Piscataway: 2003
DOI: 10.1109/IIT.2002.1257996 - , , , , :
Mask and Source Optimization for Lithographic Imaging Systems
Wave-Optical Systems Engineering II (San Diego, CA, 31. Dezember 2003 - 31. Dezember 2003)
In: Wyrowski, F. (Hrsg.): Wave-Optical Systems Engineering II, SPIE 5182 2003
DOI: 10.1117/12.504732
URL: http://www2.informatik.uni-erlangen.de/publication/download/spie5182_12.ps.gz - , , , , :
Optimization of one-and two dimensional masks in the optical lithography
Treffen der Fachgruppe Maschinelles Lernen, Wissensentdeckung, Data Mining der Gesellschaft für Informatik (FGML 2003) (Karlsruhe, 6. Oktober 2003 - 8. Oktober 2003)
In: Treffen der Fachgruppe Maschinelles Lernen, Wissensentdeckung, Data Mining der Gesellschaft für Informatik (FGML 2003) 2003
URL: http://www2.informatik.uni-erlangen.de/publication/download/fgml03.ps.gz - , :
Materials processing by focused ion beams for TEM sample preparation and nanostructuring Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung
In: Praktische Metallographie 40 (2003), S. 184-192
ISSN: 0032-678X
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0038681908∨igin=inward - , , :
Nanoscale effects in focused ion beam processing
In: Applied Physics A-Materials Science & Processing 76 (2003), S. 1017-1023
ISSN: 0947-8396
DOI: 10.1007/s00339-002-1943-1 - , , , , , , :
Characterization of charging damage in plasma doping
Ion Implantation Technology (Taos, New Mexico, USA)
In: IEEE Proc. on Ion Implantation TEchnology-2002, Piscataway: 2003
DOI: 10.1109/IIT.2002.1257973 - , , , , , :
Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors
WoDiM 2002 (Grenoble, France)
In: Proceedings of the 12th Workshop on Dielectrics in Microelectronics (WoDiM 2002), Grenoble, France: 2003
DOI: 10.1016/S0026-2714(03)00180-X - , , , , , , :
Will Darwins's Law Help Us to Improve Our Resist Models?
Advances in Resist Technology and Processing, SPIE 5039 (Santa Clara, CA, 23. Februar 2003 - 23. Februar 2003)
In: Theodore H. Fedynyshyn (Hrsg.): Advances in Resist Technology and Processing XX 2003
DOI: 10.1117/12.485078
URL: http://www2.informatik.uni-erlangen.de/publication/download/spie5039-33.pdf
2002
- , , , , , :
Plasma induced damage monitoring for HDP processes
7th Int. Symp. On Plasma & Process Induced Damage (Maui, Hawaii, USA)
In: Proc. 7th Int. Symp. On Plasma & Process Induced Damage, Santa Clara, USA: 2002
DOI: 10.1109/PPID.2002.1042615 - , , , , :
Effect of barium contamination on gate oxide integrity in high-k dram
In: Journal of Non-Crystalline Solids 303 (2002), S. 12-16
ISSN: 0022-3093
DOI: 10.1016/S0022-3093(02)00957-2 - , , , , , :
Platinum contamination issues in ferroelectric memories
In: Journal of Applied Physics 92 (2002), S. 3257-3265
ISSN: 0021-8979
DOI: 10.1063/1.1500414 - , , , , , , :
Influence of photoresist pattern on charging damage during high current ion implantation
7th International Symposium on Plasma- and Process-Induced Damage, P2ID 2002
DOI: 10.1109/PPID.2002.1042620 - , :
Erlanger Berichte Mikroelektronik
Aachen: Shaker, 2002
ISBN: 3-8322-0960-3 - , , , , , , , , , :
Development of enhanced depth-resolution technique for shallow dopant profiles
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 190 (2002), S. 26-33
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(01)01248-4 - , , :
ENCOTION - A new simulation tool for energetic contamination analysis
2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002
DOI: 10.1109/IIT.2002.1257977 - , , , :
Investigation of lanthanum contamination from a lanthanated tungsten ion source
2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002
DOI: 10.1109/IIT.2002.1258011 - , , , :
Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents
2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002
DOI: 10.1109/IIT.2002.1257972 - , , , , , , :
MOCVD of titanium dioxide on the basis of new precursors
In: Journal of Non-Crystalline Solids 303 (2002), S. 64-68
ISSN: 0022-3093
DOI: 10.1016/S0022-3093(02)00965-1 - , , :
Different ion implanted edge terminations for Schottky diodes on SiC
2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002
DOI: 10.1109/IIT.2002.1257958
2001
- , , , , , , , , , , :
Barium, strontium and bismuth contamination in CMOS processes
Trans Tech Publications Ltd, 2001
ISBN: 9783908450573
DOI: 10.4028/www.scientific.net/SSP.76-77.9 - , , , , , , , :
Impact of platinum contamination on ferroelectric memories
13th International Symposium on Integrated Ferroelectrics (Colorado Springs, CO)
DOI: 10.1080/10584580108015667 - , , , , , :
High-resolution constant-height imaging with apertured silicon cantilever probes
In: Journal of Microscopy 202 (2001), S. 22-27
ISSN: 0022-2720
DOI: 10.1046/j.1365-2818.2001.00858.x - , , , , :
Electrical reliability aspects of through the gate implanted MOS structures with thin oxides
In: Microelectronics Reliability 41 (2001), S. 987-990
ISSN: 0026-2714
DOI: 10.1016/S0026-2714(01)00053-1 - , , , :
Limitations of focused ion beam nanomachining
In: Journal of Vacuum Science & Technology B 19 (2001), S. 2533-2538
ISSN: 1071-1023
DOI: 10.1116/1.1417553 - , , , , , , , :
Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining
In: Microelectronic Engineering (2001), S. 721-728
ISSN: 0167-9317
DOI: 10.1016/S0167-9317(01)00463-4 - , , , , , , , , , , , :
Substrate misorientation as additional parameter for low temperature growth of GaAs
In: Physik mikrostrukturierter Halbleiter 23 (2001), S. 145-150
ISSN: 1434-2073 - , , :
Tungsten, nickel, and molybdenum Schottky diodes with different edge termination
In: Applied Surface Science 184 (2001), S. 413-418
ISSN: 0169-4332
DOI: 10.1016/S0169-4332(01)00527-X
2000
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Aspects of barium contamination in high dielectric dynamic random access memories
In: Journal of The Electrochemical Society 147 (2000), S. 4297-4300
ISSN: 0013-4651
DOI: 10.1149/1.1394057 - , , , , , , :
Investigation of molybdenum contamination in 11B+ and 31P+ implants
2000 13th International Conference on Ion Implantation Technology, IIT 2000 (Alpbach)
DOI: 10.1109/.2000.924252 - , , , :
Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides
2000 13th International Conference on Ion Implantation Technology, IIT 2000 (Alpbach)
DOI: 10.1109/IIT.2000.924101 - , , , , :
Phosphorus Ion Shower Implantation for special power IC applications
2000 13th International Conference on Ion Implantation Technology, IIT 2000 (Alpbach)
DOI: 10.1109/.2000.924191 - , , , , , :
Defects and gallium - Contamination during focused ion beam micro machining
2000 13th International Conference on Ion Implantation Technology, IIT 2000 (Alpbach)
DOI: 10.1109/.2000.924248 - , , , , , , :
Enhanced depth-resolution analysis with medium energy ion scattering (meis) for shallow junction profiling
2000 13th International Conference on Ion Implantation Technology, IIT 2000 (Alpbach)
DOI: 10.1109/.2000.924225 - , , , , , , , , , , , , , , , , :
Wafer Conserving Full Range Construction Analysis for IC Fabrication and Process Development Based on FIB /Dual Beam Inline Application
Proceedings of the 26th International Symposium for Testing and Failure Analysis (Bellevue, WA)
In: Proceedings of the 26th International Symposium for Testing and Failure Analysis 2000
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-10744227841∨igin=inward - , , , , , , , , , :
Field emitter array fabricated using focused ion and electron beam induced reaction
In: Journal of Vacuum Science & Technology B 18 (2000), S. 976-979
ISSN: 1071-1023
DOI: 10.1116/1.591310
1999
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Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98) (Kyoto, Jpn)
In: Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98), Piscataway, NJ, United States: 1999
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0033338246&origin=inward - , , , , :
Implantation of nitrogen into polysilicon to suppress boron penetration through the gate oxide
Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98) (Kyoto, Jpn)
In: Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98), Piscataway, NJ, United States: 1999
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AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 147 (1999), S. 142-147
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(98)00565-5 - , , , , , , , :
Scanning probe method investigation of carbon nanotubes produced by high energy ion irradiation of graphite
In: Carbon 37 (1999), S. 739-744
ISSN: 0008-6223
DOI: 10.1016/S0008-6223(98)00264-4 - , , , , , , , , :
Carbon nanotubes produced by high energy (E > 100 MeV), heavy ion irradiation of graphite
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 148 (1999), S. 1102-1105
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(98)00738-1 - , , , , , :
Nano-slit probes for near-field optical microscopy fabricated by focused ion beams
In: Journal of Microscopy 194 (1999), S. 335-339
ISSN: 0022-2720
DOI: 10.1046/j.1365-2818.1999.00505.x - , , , , , :
Ion beam-treated silicon probes operated in transmission and cross-polarized reflection mode near-infrared scanning near-field optical microscopy (NIR-SNOM)
In: Surface and Interface Analysis 27 (1999), S. 486-490
ISSN: 0142-2421
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0032643999&origin=inward - , , , , , :
Comparison of beam-induced deposition using ion microprobe
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 148 (1999), S. 25-31
ISSN: 0168-583X
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0033513926&origin=inward - , , , , :
Impurity incorporation during beam assisted processing analyzed using nuclear microprobe
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 158 (1999), S. 487-492
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(99)00371-7 - , , , , :
Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 158 (1999), S. 493-498
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(99)00501-7 - , , , , :
MOCVD of ferroelectric thin films
Proceedings of the 1999 12th European Conference on Chemical Vapour Deposition ((EUROCVD12) (Barcelona, Spain)
In: Proceedings of the 1999 12th European Conference on Chemical Vapour Deposition ((EUROCVD12), Les Ulis Cedex A, France: 1999
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0033188109&origin=inward
1998
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Distortion of sims profiles due to ion beam mixing: Shallow arsenic implants in silicon
In: Radiation Effects and Defects in Solids 145 (1998), S. 213-223
ISSN: 1042-0150
DOI: 10.1080/10420159808225765 - , , , , :
Microprobe analysis of Pt films deposited by beam induced reaction
In: Japanese Journal of Applied Physics 37 (1998), S. 7042-7046
ISSN: 0021-4922
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-4243307043&origin=inward - , , , , , , , :
Microanalysis of masklessly fabricated micro structures using nuclear microprobe
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1998), S. 373-378
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(97)00709-X
1997
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New method based on atomic force microscopy for in-depth characterization of damage in Si irraadiate with 209 MeV Kr
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 122 (1997), S. 559-562
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(96)00662-3 - , , , , , :
In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1997), S. 32-37
ISSN: 0168-583X
DOI: 10.1016/S0168-583X(96)01106-8 - , , , , :
Synthesis of SiC by high temperature C+ implantation into SiO2: The role of Si/SiO2 interface
In: Journal of The Electrochemical Society 144 (1997), S. 4314-4320
ISSN: 0013-4651
DOI: 10.1149/1.1838184 - , , , , , , :
Microanalysis of impurity contamination in masklessly etched area using focused ion beam
In: Japanese Journal of Applied Physics 36 (1997), S. 7712-7716
ISSN: 0021-4922
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0031346547&origin=inward - , , , , :
Distortion of sims profiles due to ion beam mixing
In: Radiation Effects and Defects in Solids 141 (1997), S. 37-52
ISSN: 1042-0150
DOI: 10.1080/10420159708211555 - , , , , , :
Measurement of shallow arsenic impurity profiles in semiconductor silicon using time-of-flight secondary ion mass spectrometry and total reflection X-ray fluorescence spectrometry
In: Journal of The Electrochemical Society 144 (1997), S. 3979-3983
ISSN: 0013-4651
DOI: 10.1149/1.1838122
1996
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Reduction of lateral parasitic current flow by buried recombination layers formed by high energy implantation of C or O into silicon
Proceedings of the 1996 11th International Conference on Ion Implantation Technology (Austin, TX, USA)
In: Ishida E.; Mehta S.; Banerjee S.; Current M.; Smith T.C.; et al (Hrsg.): Proceedings of the 1996 11th International Conference on Ion Implantation Technology, Piscataway, NJ, United States: 1996
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Deep implants for semiconductor device applications
In: Radiation Effects and Defects in Solids 140 (1996), S. 87-101
ISSN: 1042-0150
DOI: 10.1080/10420159608212943 - , , , :
A multi-laminate wire mesh ionizer for a Cs sputter negative ion source
In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 382 (1996), S. 332-334
ISSN: 0168-9002
DOI: 10.1016/S0168-9002(96)00701-2 - , , , , , :
A comparison of focused ion beam and electron beam induced deposition processes
In: Microelectronics Reliability 36 (1996), S. 1779-1782
ISSN: 0026-2714
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Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition
In: Journal of Vacuum Science & Technology B 14 (1996), S. 3920-3923
ISSN: 1071-1023
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Investigations on the topology of structures milled and etched by focused ion beams
In: Journal of Vacuum Science & Technology B 14 (1996), S. 3996-3999
ISSN: 1071-1023
URL: https://www.scopus.com/record/display.uri?eid=2-s2.0-0001398692∨igin=inward
1995
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Comparison of retrograde and conventional p-wells in regard of latch-up susceptibility
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 96 (1995), S. 411-415
ISSN: 0168-583X
DOI: 10.1016/0168-583X(94)00530-3 - , , , , :
Model for the electronic stopping of channeled ions in silicon around the stopping power maximum
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 (1995), S. 47-50
ISSN: 0168-583X
DOI: 10.1016/0168-583X(95)00676-1 - , , , :
Improved delineation technique for two dimensional dopant profiling
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 96 (1995), S. 133-138
ISSN: 0168-583X
DOI: 10.1016/0168-583X(94)00472-2 - , , , , , :
Local material removal by focused ion beam milling and etching
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 106 (1995), S. 630-635
ISSN: 0168-583X
DOI: 10.1016/0168-583X(95)00778-4
1994
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Investigation of the effect of altered defect structure produced by photon assisted implantation on the diffusion of As in silicon during thermal annealing
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85 (1994), S. 925-928
ISSN: 0168-583X
DOI: 10.1016/0168-583X(94)95952-8 - , , , , , , , :
Practical aspects of ion beam analysis of semiconductor structures
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 85 (1994), S. 356-362
ISSN: 0168-583X
DOI: 10.1016/0168-583X(94)95844-0 - , , , , :
Analytical description of high energy implantation profiles of boron and phosphorus into crystalline silicon
In: Radiation Effects and Defects in Solids 127 (1994), S. 385-395
ISSN: 1042-0150
DOI: 10.1080/10420159408221046 - , , , , , , , :
Athermal effects in ion implanted layers
In: Radiation Effects and Defects in Solids 127 (1994), S. 397-404
ISSN: 1042-0150
DOI: 10.1080/10420159408221047
1993
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Photon assisted implantation (PAI)
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1993), S. 607-611
ISSN: 0168-583X
DOI: 10.1016/0168-583X(93)96191-E - , , , :
High energy implantation of 10B and 11B into (100) silicon in channel and in random direction
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1993), S. 659-662
ISSN: 0168-583X
DOI: 10.1016/0168-583X(93)96203-O - , , , , :
Analysis of microstructured samples by focused ion beam sample preparation
In: Microelectronic Engineering 21 (1993), S. 375-378
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90095-M - , , , :
A novel delineation technique for 2D-profiling of dopants in crystalline silicon
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 74 (1993), S. 186-190
ISSN: 0168-583X
DOI: 10.1016/0168-583X(93)95040-C - , , , :
Effect of ion-beam mixing temperature on cobalt silicide formation
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1993), S. 786-789
ISSN: 0168-583X
DOI: 10.1016/0168-583X(93)90682-V - , , , , , , :
Application of advanced contamination analysis for qualification of wafer handling systems and chucks
In: Applied Surface Science 63 (1993), S. 93-98
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90070-R - , , , , , :
Contamination control and ultrasensitive chemical analysis
In: Applied Surface Science 63 (1993), S. 79-87
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90068-M
1992
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End-of-range disorder influenced by inherent oxygen in silicon
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 71 (1992), S. 399-405
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High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 62 (1992), S. 410-415
ISSN: 0168-583X
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Characterization of metal impurities in silicon-on-insulator material
In: Materials Science and Engineering B-Advanced Functional Solid-State Materials 12 (1992), S. 195-198
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90285-H - , , , , :
Simulation of high energy implantation profiles in crystalline silicon
In: Microelectronic Engineering (1992), S. 495-498
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Analysis of trace metals on silicon surfaces
In: Fresenius Zeitschrift für Analytische Chemie 343 (1992), S. 765-768
ISSN: 0016-1152
DOI: 10.1007/BF00633562
1991
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Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon
In: Journal of Materials Research 6 (1991), S. 1695-1700
ISSN: 0884-2914
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Tribological properties of carbonized photoresist
In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1991), S. 793-797
ISSN: 0168-583X
DOI: 10.1016/0168-583X(91)95706-J