Cleanroom Lab

The Chair of Electron Devices, together with the Fraunhofer Institute for Integrated Systems and Device Technology (IISB), maintains a cleanroom laboratory with an area of 600 m² of class 100 cleanroom space and 400 m² of class 10,000 cleanroom space. The modern equipment offers excellent conditions for demanding research tasks in the field of power, micro, and nanoelectronics.

Together with Fraunhofer IISB, an extensive process technology is operated that enables CMOS-compatible process steps for the production of test structures and components in 150 and 200 mm silicon technology. Individual process steps are available for wafer sizes up to 300 mm. In addition, LEB and IISB operate a process line for the manufacture of components on silicon carbide substrates.

Close international cooperation with other research institutions and industry exists in all areas.