Completed 2026MA: Investigation of correlations between process data, test structure properties and device caracteristics of MOSFETs via machine learning models
Zhifeng Huang — In recent years, artificial intelligence (AI) technologies such as machine learning have developed rapidly. The decrease in computing cost provides a potentially efficient solution for monitoring, analyzing, and predicting key parameters of metal-oxide-semiconductor fieldeffect transistors (MOSFETs).Based on this development, this work investigates a method that uses a random forest regressor model to […]Zhifeng Huang — In recent years, artificial intelligence (AI) technologies such as machine learning have developed rapidly. The decrease in computing cost provides a potentially efficient solution for monitoring, analyzing, and predicting key parameters of metal-oxide-semiconductor fieldeffect transistors (MOSFETs).Based on this development, this work investigates a method that uses a random forest regressor model to […]