Completed 2025BA: Investigation and optimization of the process parameters of mr-NIL213FC Resist for UV-NIL to produce nanoscale structures in Si and SiC
Niklas Kardatzki – Nanostructures such as nanopillars/-holes, nanoline structures, or nanoparticles have proven to be highly effective in fields such as photonics, MEMS/MOEMS/NEMS, biocompatible sensors, and quantum sensing. A crucial step in this process is the structuring of host materials like silicon (Si) and silicon carbide (SiC). To transfer and implement the required nanostructures, lithographic […]Niklas Kardatzki – Nanostructures such as nanopillars/-holes, nanoline structures, or nanoparticles have proven to be highly effective in fields such as photonics, MEMS/MOEMS/NEMS, biocompatible sensors, and quantum sensing. A crucial step in this process is the structuring of host materials like silicon (Si) and silicon carbide (SiC). To transfer and implement the required nanostructures, lithographic […]
